Kinetic modeling of the charging of nonconducting walls in a low pressure radio frequency inductively coupled plasma

1998 ◽  
Vol 16 (1) ◽  
pp. 300-305 ◽  
Author(s):  
U. Kortshagen
Keyword(s):  
Radio Frequency ◽  
Kinetic Modeling ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Inductively Coupled

Diamond deposition from methanol–hydrogen–water mixed gas using a low pressure, radio frequency, inductively-coupled plasma

1998 ◽  
Vol 332 (1-2) ◽  
pp. 136-140 ◽  
Author(s):  
Mineo Hiramatsu ◽  
Hideyuki Noda ◽  
Hisao Nagai ◽  
Masao Shimakura ◽  
Masahito Nawata
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Mixed Gas ◽  
Diamond Deposition ◽  
Hydrogen Water ◽  
Inductively Coupled

Synthesis of diamond using a low pressure, radio frequency, inductively coupled plasma

1998 ◽  
Vol 16 (6) ◽  
pp. 3170-3174 ◽  
Author(s):  
Hideyuki Noda ◽  
Hisao Nagai ◽  
Masao Shimakura ◽  
Mineo Hiramatsu ◽  
Masahito Nawata
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Inductively Coupled

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled
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