Structured ion energy distribution in radio frequency glow‐discharge systems

Ch. Wild; P. Koidl

doi:10.1063/1.100913

Structured ion energy distribution in radio frequency glow‐discharge systems

Applied Physics Letters ◽

10.1063/1.100913 ◽

1989 ◽

Vol 54 (6) ◽

pp. 505-507 ◽

Cited By ~ 107

Author(s):

Ch. Wild ◽

P. Koidl

Keyword(s):

Glow Discharge ◽

Energy Distribution ◽

Radio Frequency ◽

Ion Energy ◽

Radio Frequency Glow Discharge ◽

Ion Energy Distribution

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Ion energy distribution in a radio frequency sheath of plasma with Kappa electron velocity distribution

Contributions to Plasma Physics ◽

10.1002/ctpp.202000108 ◽

2020 ◽

Vol 61 (2) ◽

Author(s):

Jing Ou ◽

Yueheng Huang

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Velocity Distribution ◽

Electron Velocity ◽

Electron Velocity Distribution ◽

Ion Energy ◽

Ion Energy Distribution

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Simulation of heavy ion energy distribution function in the cathode sheath of noble gas mixture glow discharge

Vacuum ◽

10.1016/s0042-207x(98)00415-1 ◽

1999 ◽

Vol 53 (1-2) ◽

pp. 25-27

Author(s):

G.G. Bondarenko ◽

V.I. Kristya

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Noble Gas ◽

Heavy Ion ◽

Energy Distribution Function ◽

Gas Mixture ◽

Cathode Sheath ◽

Ion Energy ◽

Ion Energy Distribution

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Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements

Applied Science and Convergence Technology ◽

10.5757/asct.2014.23.6.357 ◽

2014 ◽

Vol 23 (6) ◽

pp. 357-365

Author(s):

Myung-Sun Choi ◽

Seok-Hwan Lee ◽

Yunchang Jang ◽

Sangwon Ryu ◽

Gon-Ho Kim

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Ion Energy Distribution ◽

Non Invasive ◽

Coupled Plasmas ◽

Radio Frequency Voltage

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Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5054101 ◽

2019 ◽

Vol 37 (2) ◽

pp. 021301 ◽

Cited By ~ 3

Author(s):

Vincent Garofano ◽

Florence Montpetit ◽

Xavier Glad ◽

Reetesh Kumar Gangwar ◽

Luc Stafford

Keyword(s):

Distribution Function ◽

Magnetron Sputtering ◽

Energy Distribution ◽

Radio Frequency ◽

Kinetic Modeling ◽

Substrate Surface ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution ◽

Argon Plasmas

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Ion energy distribution functions in inductively coupled radio-frequency discharges—Mixtures of Cl2/BCl3/Ar

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581491 ◽

1998 ◽

Vol 16 (6) ◽

pp. 3389-3395 ◽

Cited By ~ 19

Author(s):

C. A. Nichols ◽

J. R. Woodworth ◽

T. W. Hamilton

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Energy Distribution Functions

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Ion energy distribution function measurements by laser-induced fluorescence in a dual radio frequency sheath

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4941069 ◽

2016 ◽

Vol 34 (2) ◽

pp. 021303

Author(s):

Nathaniel B. Moore ◽

Walter Gekelman ◽

Patrick Pribyl

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Laser Induced Fluorescence ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution

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Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge

Physics of Plasmas ◽

10.1063/1.2795634 ◽

2007 ◽

Vol 14 (10) ◽

pp. 103510 ◽

Cited By ~ 36

Author(s):

D. O’Connell ◽

R. Zorat ◽

A. R. Ellingboe ◽

M. M. Turner

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Distribution Functions ◽

Ion Energy ◽

Capacitively Coupled ◽

Ion Energy Distribution ◽

Particle In Cell ◽

Energy Distribution Functions ◽

Radio Frequency Discharge

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Retarding Field Analyzer for Ion Energy Distribution Measurement Through a Radio-Frequency or Pulsed Biased Sheath

Plasma Processes and Polymers ◽

10.1002/ppap.200931607 ◽

2009 ◽

Vol 6 (S1) ◽

pp. S643-S648 ◽

Cited By ~ 11

Author(s):

David Gahan ◽

Borislav Dolinaj ◽

Chanel Hayden ◽

Michael B. Hopkins

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Ion Energy ◽

Distribution Measurement ◽

Ion Energy Distribution

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Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode

Review of Scientific Instruments ◽

10.1063/1.2890100 ◽

2008 ◽

Vol 79 (3) ◽

pp. 033502 ◽

Cited By ~ 86

Author(s):

D. Gahan ◽

B. Dolinaj ◽

M. B. Hopkins

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Ion Energy ◽

Ion Energy Distribution

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Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Applied Physics Letters ◽

10.1063/1.109265 ◽

1993 ◽

Vol 62 (21) ◽

pp. 2622-2624 ◽

Cited By ~ 86

Author(s):

Michael S. Barnes ◽

John C. Forster ◽

John H. Keller

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Glow Discharge

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