Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge

2007 ◽  
Vol 14 (10) ◽  
pp. 103510 ◽  
Author(s):  
D. O’Connell ◽  
R. Zorat ◽  
A. R. Ellingboe ◽  
M. M. Turner
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distribution ◽  
Particle In Cell ◽  
Energy Distribution Functions ◽  
Radio Frequency Discharge

scholarly journals Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

2013 ◽  
Vol 46 (8) ◽  
pp. 084016 ◽  
Author(s):  
Jan Trieschmann ◽  
Mohammed Shihab ◽  
Daniel Szeremley ◽  
Abd Elfattah Elgendy ◽  
Sara Gallian ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Radio Frequency Discharges ◽  
Energy Distribution Functions

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions
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