Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Michael S. Barnes; John C. Forster; John H. Keller

doi:10.1063/1.109265

Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Applied Physics Letters ◽

10.1063/1.109265 ◽

1993 ◽

Vol 62 (21) ◽

pp. 2622-2624 ◽

Cited By ~ 86

Author(s):

Michael S. Barnes ◽

John C. Forster ◽

John H. Keller

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Glow Discharge

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Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

10.1117/12.570023 ◽

2004 ◽

Author(s):

Anna G. Kalyuzhnaya ◽

Andrew V. Ryabtsev ◽

Anatoliy I. Shchedrin

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Hollow Cathode ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Cited By ~ 15

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Electron energy distribution function in He‐CO radio‐frequency plasmas: The role of vibrational and electronic superelastic collisions

Journal of Applied Physics ◽

10.1063/1.339075 ◽

1987 ◽

Vol 62 (11) ◽

pp. 4398-4403 ◽

Cited By ~ 27

Author(s):

M. Capitelli ◽

R. Celiberto ◽

C. Gorse ◽

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Electron energy distribution function in the positive column of a neon glow discharge using the black wall approximation

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/38/8/010 ◽

2005 ◽

Vol 38 (8) ◽

pp. 1156-1163 ◽

Cited By ~ 1

Author(s):

Sh Al-Hawat ◽

M Naddaf

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Positive Column ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Neon Glow Discharge

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Effect of the shape of the electron energy distribution function on the dust grain charge and its screening in glow discharge plasmas

Plasma Physics Reports ◽

10.1134/s1063780x12020031 ◽

2012 ◽

Vol 38 (3) ◽

pp. 244-253 ◽

Cited By ~ 3

Author(s):

I. N. Derbenev ◽

N. A. Dyatko ◽

A. V. Filippov

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Discharge Plasmas ◽

Dust Grain

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Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578228 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1207-1211 ◽

Cited By ~ 31

Author(s):

John V. Scanlan ◽

Michael B. Hopkins

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Time-Resolved Electron Energy Distribution Function Measurements in a Low-Frequency r.f. Glow Discharge

EPL (Europhysics Letters) ◽

10.1209/0295-5075/8/2/006 ◽

1989 ◽

Vol 8 (2) ◽

pp. 141-145 ◽

Cited By ~ 21

Author(s):

M. B Hopkins ◽

C. A Anderson ◽

W. G Graham

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Time Resolved

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Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

Technical Physics ◽

10.1134/1.1538724 ◽

2003 ◽

Vol 48 (1) ◽

pp. 38-42 ◽

Cited By ~ 3

Author(s):

A. G. Kalyuzhnaya ◽

A. V. Ryabtsev ◽

A. I. Shchedrin

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Hollow Cathode ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Measurement of the Electron Energy Distribution Function in the Positive Column of the Glow Discharge Admittance Method

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.113.1_8 ◽

1993 ◽

Vol 113 (1) ◽

pp. 8-16

Author(s):

Yuji Matsuura ◽

Takeshi Sakaguchi ◽

Yasusi Yamagishi ◽

Yoshio Saito ◽

Nozomu Nitta ◽

...

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Positive Column ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Admittance Method

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Emissive probe measurements of electron energy distribution function in radio-frequency plasma

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359477 ◽

2005 ◽

Author(s):

H. Shindo ◽

T. Ozawa ◽

T. Fukasawa

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Frequency Plasma ◽

Probe Measurements

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