Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas

Vincent Garofano; Florence Montpetit; Xavier Glad; Reetesh Kumar Gangwar; Luc Stafford

doi:10.1116/1.5054101

Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5054101 ◽

2019 ◽

Vol 37 (2) ◽

pp. 021301 ◽

Cited By ~ 3

Author(s):

Vincent Garofano ◽

Florence Montpetit ◽

Xavier Glad ◽

Reetesh Kumar Gangwar ◽

Luc Stafford

Keyword(s):

Distribution Function ◽

Magnetron Sputtering ◽

Energy Distribution ◽

Radio Frequency ◽

Kinetic Modeling ◽

Substrate Surface ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution ◽

Argon Plasmas

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Ion energy distribution function measurements by laser-induced fluorescence in a dual radio frequency sheath

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4941069 ◽

2016 ◽

Vol 34 (2) ◽

pp. 021303

Author(s):

Nathaniel B. Moore ◽

Walter Gekelman ◽

Patrick Pribyl

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Laser Induced Fluorescence ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution

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Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/41/9/095203 ◽

2008 ◽

Vol 41 (9) ◽

pp. 095203 ◽

Cited By ~ 70

Author(s):

A Hecimovic ◽

K Burcalova ◽

A P Ehiasarian

Keyword(s):

Distribution Function ◽

Magnetron Sputtering ◽

Energy Distribution ◽

High Power ◽

Plasma Discharge ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution

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A particle-in-cell Monte Carlo simulation of an rf discharge in methane: frequency and pressure features of the ion energy distribution function

Plasma Sources Science and Technology ◽

10.1088/0963-0252/15/3/015 ◽

2006 ◽

Vol 15 (3) ◽

pp. 402-409 ◽

Cited By ~ 10

Author(s):

O V Proshina ◽

T V Rakhimova ◽

A T Rakhimov

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Rf Discharge ◽

Ion Energy ◽

Ion Energy Distribution ◽

Particle In Cell

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Simulation of heavy ion energy distribution function in the cathode sheath of noble gas mixture glow discharge

Vacuum ◽

10.1016/s0042-207x(98)00415-1 ◽

1999 ◽

Vol 53 (1-2) ◽

pp. 25-27

Author(s):

G.G. Bondarenko ◽

V.I. Kristya

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Noble Gas ◽

Heavy Ion ◽

Energy Distribution Function ◽

Gas Mixture ◽

Cathode Sheath ◽

Ion Energy ◽

Ion Energy Distribution

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Perturbation of the ECR plasma ion energy distribution function during the interaction with a laser-generated plasma

Radiation Effects and Defects in Solids ◽

10.1080/10420151003729474 ◽

2010 ◽

Vol 165 (6-10) ◽

pp. 618-625 ◽

Cited By ~ 1

Author(s):

S. Gammino ◽

D. Mascali ◽

L. Neri ◽

L. Celona ◽

G. Ciavola ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution ◽

Ecr Plasma

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Laser-Induced Fluorescence Measurement of the Ion-Energy-Distribution Function in a Collisionless Reconnection Experiment

Physical Review Letters ◽

10.1103/physrevlett.95.235005 ◽

2005 ◽

Vol 95 (23) ◽

Cited By ~ 15

Author(s):

A. Stark ◽

W. Fox ◽

J. Egedal ◽

O. Grulke ◽

T. Klinger

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Laser Induced Fluorescence ◽

Energy Distribution Function ◽

Fluorescence Measurement ◽

Ion Energy ◽

Ion Energy Distribution ◽

Collisionless Reconnection

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Reconstruction of ion energy distribution function in a capacitive rf discharge

Applied Physics Letters ◽

10.1063/1.3147216 ◽

2009 ◽

Vol 94 (21) ◽

pp. 211503 ◽

Cited By ~ 21

Author(s):

W. C. Chen ◽

X. M. Zhu ◽

S. Zhang ◽

Y. K. Pu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Rf Discharge ◽

Ion Energy ◽

Ion Energy Distribution

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Ion energy distribution function in the wall layer at a negative wall potential with respect to the plasma

Physics of Plasmas ◽

10.1063/1.5017309 ◽

2018 ◽

Vol 25 (1) ◽

pp. 013513 ◽

Cited By ~ 3

Author(s):

Vladimir S. Sukhomlinov ◽

Alexander S. Mustafaev ◽

Oskar Murillo

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Wall Layer ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution ◽

Wall Potential

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Measurement of parallel ion energy distribution function in PISCES plasma

10.2172/6268436 ◽

1987 ◽

Cited By ~ 3

Author(s):

G.R. Tynan ◽

D.M. Goebel ◽

R.W. Conn

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Ion Energy ◽

Ion Energy Distribution

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Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform

Physics of Plasmas ◽

10.1063/5.0061605 ◽

2021 ◽

Vol 28 (10) ◽

pp. 103502

Author(s):

Sarveshwar Sharma ◽

Nishant Sirse ◽

Animesh Kuley ◽

Miles M Turner

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

High Frequency ◽

Energy Distribution Function ◽

Very High Frequency ◽

Ion Energy ◽

Ion Energy Distribution ◽

Capacitive Discharges ◽

Very High

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