Reactive Deposition of Conformal Metal Oxide Films from Supercritical Carbon Dioxide

2007 ◽  
Vol 19 (23) ◽  
pp. 5460-5466 ◽  
Author(s):  
Adam O'Nei ◽  
James J. Watkins
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Metal Oxide ◽  
Oxide Films ◽  
Metal Oxide Films ◽  
Reactive Deposition ◽  
Supercritical Carbon

Etching of Silicon Oxide Films in Supercritical Carbon Dioxide

2005 ◽  
pp. 115-120 ◽  
Author(s):  
Koichiro Saga ◽  
Hitoshi Kuniyasu ◽  
Takeshi Hattori ◽  
Kenji Yamada ◽  
Tomoyuki Azuma
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Supercritical Carbon

Supercritical Carbon Dioxide Enables Rapid, Clean, and Scalable Conversion of a Metal Oxide into Zeolitic Metal–Organic Frameworks

2018 ◽  
Vol 18 (5) ◽  
pp. 3222-3228 ◽  
Author(s):  
Joseph M. Marrett ◽  
Cristina Mottillo ◽  
Simon Girard ◽  
Christopher W. Nickels ◽  
Jean-Louis Do ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Metal Oxide ◽  
Metal Organic Frameworks ◽  
Metal Organic ◽  
Supercritical Carbon

Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution

2000 ◽  
Vol 12 (9) ◽  
pp. 2625-2631 ◽  
Author(s):  
Jason M. Blackburn ◽  
David P. Long ◽  
James J. Watkins
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Reactive Deposition ◽  
Supercritical Carbon

Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films

2006 ◽  
Vol 88 (9) ◽  
pp. 092904 ◽  
Author(s):  
Dipak Barua ◽  
Theodosia Gougousi ◽  
Erin D. Young ◽  
Gregory N. Parsons
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Metal Oxide ◽  
Metal Thin Films ◽  
Supercritical Carbon
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