Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films

2006 ◽  
Vol 88 (9) ◽  
pp. 092904 ◽  
Author(s):  
Dipak Barua ◽  
Theodosia Gougousi ◽  
Erin D. Young ◽  
Gregory N. Parsons
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Metal Oxide ◽  
Metal Thin Films ◽  
Supercritical Carbon

Low-Temperature Processing of Sol-Gel Derived Metal Oxide Thin Films using Supercritical Carbon Dioxide Fluid

2008 ◽  
Vol 1113 ◽  
Author(s):  
Hiroshi Uchida ◽  
Kaori Fujioka ◽  
Seiichiro Koda
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Metal Oxide ◽  
Substrate Temperature ◽  
Sol Gel ◽  
Processing Temperature ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Supercritical Carbon

ABSTRACTWe demonstrate a novel technique using supercritical carbon dioxide (scCO2) fluid for lowering processing temperature of sol-gel-derived metal oxide thin films. The film processing was performed in a hot-wall closed vessel filled with scCO2 fluid. The effects of fluid temperature and additives on the sol-gel synthesis reaction under scCO2 fluid were also investigated. Precursor films of titanium dioxide (TiO2) prepared on silicon wafer and silica glass by sol-gel coating using Ti-alkoxide were converted to crystalline TiO2 (anatase) films successfully by treatment in scCO2 without additive agent at a fluid pressure of 15 MPa and at a substrate temperature of above 250°C, which is significantly lower than the processing temperature of conventional sol-gel deposition. Furthermore, additive agents such as water (H2O) and nitrogen-oxygen mixture (N2-O2) promoted the decomposition and crystallization of precursor films in scCO2 fluid to form the crystalline TiO2 (anatase) films at a substrate temperature at as low as 200°C although it also produced surface absorbates consisted of hydroxides on the film surface. The experimental results suggested that the hydrolysis and polymerization reactions of Ti-alkoxide in the precursor films were proceeded by the scCO2 processing to form titanium-oxygen (Ti-O) networks and that byproducts such as alcohols were removed from the resulting films.

Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) β-Diketone Complex

2009 ◽  
Vol 156 (6) ◽  
pp. H443 ◽  
Author(s):  
Masahiro Matsubara ◽  
Michiru Hirose ◽  
Kakeru Tamai ◽  
Yukihiro Shimogaki ◽  
Eiichi Kondoh
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Kinetics Of ◽  
Supercritical Carbon

scholarly journals Dynamics of polymer thin films in supercritical carbon dioxide

2002 ◽  
Vol 60 (4) ◽  
pp. 559-565 ◽  
Author(s):  
T Koga ◽  
Y.-S Seo ◽  
X Hu ◽  
K Shin ◽  
Y Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Polymer Thin Films ◽  
Supercritical Carbon

Preparation of nanocrystalline titania thin films by using pure and water-modified supercritical carbon dioxide

2016 ◽  
Vol 117 ◽  
pp. 289-296 ◽  
Author(s):  
Marie Sajfrtová ◽  
Marie Cerhová ◽  
Vladislav Dřínek ◽  
Stanislav Daniš ◽  
Lenka Matějová
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Nanocrystalline Titania ◽  
Supercritical Carbon

Thermally robust nanocellular thin films of high-Tg semifluorinated block copolymers foamed with supercritical carbon dioxide

Soft Matter ◽  
2011 ◽  
Vol 7 (8) ◽  
pp. 4032 ◽  
Author(s):  
Rui Zhang ◽  
Cedric Dutriez ◽  
Kenji Sugiyama ◽  
Takashi Ishizone ◽  
Hideaki Yokoyama
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Block Copolymers ◽  
Supercritical Carbon Dioxide ◽  
Supercritical Carbon
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