Reactive deposition of cobalt using bis(2,2,6,6-tetramethyl-3,5-heptanedionato) cobalt(II) from supercritical carbon dioxide

2016 ◽  
Vol 107 ◽  
pp. 189-195 ◽  
Author(s):  
Masashi Haruki ◽  
Shengkai Li ◽  
Gang Qian ◽  
James J. Watkins
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Reactive Deposition ◽  
Supercritical Carbon

Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution

2000 ◽  
Vol 12 (9) ◽  
pp. 2625-2631 ◽  
Author(s):  
Jason M. Blackburn ◽  
David P. Long ◽  
James J. Watkins
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Reactive Deposition ◽  
Supercritical Carbon
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