scholarly journals An effect of dummy cathode on thickness uniformity in electroforming process

2014 ◽  
Vol 4 ◽  
pp. 107-112 ◽  
Author(s):  
Chul-Woo Park ◽  
Kyoung-Yong Park
Keyword(s):  
Thickness Uniformity ◽  
Electroforming Process

scholarly journals Study on Improving Thickness Uniformity of Microfluidic Chip Mold in the Electroforming Process

Micromachines ◽  
2016 ◽  
Vol 7 (1) ◽  
pp. 7 ◽  
Author(s):  
Liqun Du ◽  
Tong Yang ◽  
Ming Zhao ◽  
Yousheng Tao ◽  
Lei Luo ◽  
...  
Keyword(s):  
Microfluidic Chip ◽  
Thickness Uniformity ◽  
Electroforming Process

Effect of the Thickness Uniformity in Micro-Electroforming Process by Dividing Conductive Zone on Cathode

2009 ◽  
Vol 60-61 ◽  
pp. 202-206
Author(s):  
Li Qun Du ◽  
Li Chuan Yu ◽  
Lei Song ◽  
Chong Liu
Keyword(s):  
Theoretical Analysis ◽  
Current Density ◽  
Thickness Ratio ◽  
Experimental Results ◽  
Thickness Uniformity ◽  
Conductive Zone ◽  
Electroforming Process ◽  
Nickel Electroforming

In this paper, an effective method is presented to improve thickness uniformity in nickel electroforming process. In most electroforming processes, thickness ratio of edge to center is 2.5~4 and the shape of the electroforming zone is naturally a concave. Dividing conductive zone of electroforming structure to redistribute current density was applied to improve electroforming uniformity. Theoretical analysis and experimental results verify that a proper dividing method can improve the electroforming uniformity effectively. In the experiment, the thickness ratio of edge to center decreases from 2.91 to 1.88.

Fabrication of Low CTE Metal Masks by the Invar Fe-Ni Alloy Electroforming Process for Large and Fine Pitch OLED Displays

2013 ◽  
Vol 50 (52) ◽  
pp. 117-122 ◽  
Author(s):  
T. Nagayama ◽  
T. Yamamoto ◽  
T. Nakamura ◽  
Y. Mizutani
Keyword(s):  
Electroforming Process ◽  
Fine Pitch ◽  
Ni Alloy

Thickness uniformity of films deposited on rotating substrates

2009 ◽  
Vol 76 (2) ◽  
pp. 100 ◽  
Author(s):  
E. N. Kotlikov ◽  
V. N. Prokashev ◽  
V. A. Ivanov ◽  
A. N. Tropin
Keyword(s):  
Thickness Uniformity

The effect of patterned susceptor on the thickness uniformity of rapid thermal oxides

1999 ◽  
Vol 12 (3) ◽  
pp. 340-344 ◽  
Author(s):  
Kuo-Chung Lee ◽  
Hong-Yuan Chang ◽  
Hong Chang ◽  
Jenn-Gwo Hwu ◽  
Tzong-Shyan Wung
Keyword(s):  
Thickness Uniformity

Controlling the Thickness Uniformity in Equal Channel Angular Rolling (ECAR)

2007 ◽  
Vol 539-543 ◽  
pp. 2872-2877 ◽  
Author(s):  
Young Hoon Chung ◽  
Jong Woo Park ◽  
Kyong Hwan Lee
Keyword(s):  
Shear Strain ◽  
Shear Deformation ◽  
Control Mechanism ◽  
Sheet Thickness ◽  
Surface Friction ◽  
Metal Sheet ◽  
Thickness Variation ◽  
Thickness Control ◽  
Thickness Uniformity ◽  
Elastic Unit

As the surface friction between feeding rolls and metal sheet generates the feeding power of ECAR, the generated feeding power is low, and the friction between the metal sheet and ECAR die should be minimized. However, for obtaining a large shear deformation by ECAR, the metal sheet should be tightly contacted with the wall of ECAR die. In this condition, the thickness of the metal sheet is continuously increased during ECAR. A new ECAR apparatus is developed for maximizing the shear deformation and obtaining sheet thickness uniformity, and succeeding continuous ECAR with such a limited feeding power. By controlling the outlet gap of the ECAR die with elastic unit, the thickness of the metal sheet is kept uniform. Detailed thickness control mechanism during the new ECAR process is analyzed. A sheet of Al 6063 alloy that is 1-pass deformed with the new ECAR apparatus shows below ±0.037 mm of thickness variation and 0.61 of shear strain.

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