Fabrication of 2.5D Rock-Based Micromodels With High Resolution Features

Fabrication of 2.5D rock-based micromodels with high resolution features is presented using SU-8 multi-layer lithography and nickel electroforming for nickel molds. Processes associated with SU-8 were carefully optimized by the use of the vacuum contact, the use of UV filter, and controls of UV exposure doses and baking times. The use of SU-8 MicroSpray enabled the easy fabrication of multi-layers of SU-8, while exhibiting some total thickness variations. The thirteen layered SU-8 samples showed reliable patterning results for features at 10 and 25 μm resolutions, and minor pattern distortions of features at the 5 μm resolution. Flycutting method employed in multi-layer lithography of SU-8 yielded accurate total thickness control within ±1.5 μm and excellent pattern formation for all of 5, 10, and 25 μm features. Electroforming of nickel was optimized with electroplating bath composition and electroplating parameters such as current density to realize the high resolution nickel mold. The fabricated nickel molds from flycutting based SU-8 samples revealed the feasibility of manufacturing the minimum features down to 5 μm for thirteen layers without any pattern distortions. The replication-based micromolding method will allow for fabrication of micromodels in a variety of materials such as polymers and ceramics. The high resolution, 2.5D micromodels will be used for investigation of pore-scale fluid transport, which will aid in understanding the complicated fluidic phenomena occurring in the 3D reservoir rock.

The Micro/Nanohybrid Structures Enhancing B35 Cell Guidance on Chitosan

A novel chitosan scaffold with micro- and nano-hybrid structures was proposed in this study. The hemispheric array of the barrier layer of an anodic aluminum oxide (AAO) film was used as the substrate. Microelectromechanical systems and nickel electroforming techniques were integrated for fabricating chitosan scaffolds with different micro/nanohybrid structures. Nerve cells were then cultured on the conduits. It was demonstrated that the scaffold with pure microstructures can guide the nerve cells to grow along the ridges of the microstructure and some cells to grow across the groove in between two ridges of the microstructure. It was also shown that the scaffold with microscale ridges and nanopatterns on the groove between two ridges can more effectively guide the cells to grow along the ridges, thus enhancing the proliferation of nerve cells.

Abrasive-Assisted Electroforming of Nickel on Translational Cathode

Spherical abrasives were employed to polish the growing deposited layer during nickel electroforming process. On a translational flat cathode, nickel deposits with distinct polishing mark were obtained. It was found that the abrasive polishing can help to improve the microstructure and increase the mechanical properties of the nickel deposits. Compared with the deposits prepared with traditional method, the microstructure became more homogeneous and the microhardness increased nearly two times. The increase of current density led to coarse structure and lower microhardness.

Design and Fabrication of the Piezoelectrically Actuated Micropump with Implanted Check Valves

This paper aims to present the design, fabrication and test of a novel piezoelectrically actuated, check valve embedded micropump having the advantages of miniature size, light weight and low power consumption. The micropump consists of a piezoelectric actuator, a stainless steel chamber layer with membrane, two stainless steel channel layers with two valve seats, and a nickel check valve layer with two bridge-type check valves. The check valve layer was fabricated by nickel electroforming process on a stainless steel substrate. The chamber and the channel layer were made of the stainless steel manufactured using the lithography and etching process based on MEMS fabrication technology. The effects of check valve thickness, operating frequency and back pressure on the flow rate of the micropump are investigated. The micropump with check valve 20 μm in thickness obtained higher output values under the sinusoidal waveform of 120 Vpp and 160 Hz. The maximum flow rate and backpressure are 1.82 ml/min and 32 kPa, respectively.