The effect of patterned susceptor on the thickness uniformity of rapid thermal oxides
1999 ◽
Vol 12
(3)
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pp. 340-344
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1993 ◽
Vol 61
(1-3)
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pp. 282-286
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2007 ◽
Vol 539-543
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pp. 2872-2877
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2016 ◽
Vol 164
◽
pp. 139-144
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2010 ◽
Vol 33
(7)
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pp. 1021-1033
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