A competition between (001) and (011) alignments in yttria stabilized zirconia thin films fabricated by ion beam assisted deposition

2010 ◽  
Vol 470 (15-16) ◽  
pp. 622-625 ◽  
Author(s):  
Z. Wang ◽  
B.J. Yan ◽  
F. Feng ◽  
H. Chen ◽  
K. Shi ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Ion Beam Assisted Deposition

Role of Yttria-stabilized Zirconia Produced by Ion-beam-assisted Deposition on the Properties of RuO2 on SiO2/Si

1998 ◽  
Vol 13 (9) ◽  
pp. 2461-2464 ◽  
Author(s):  
Q. X. Jia ◽  
P. Arendt ◽  
J. R. Groves ◽  
Y. Fan ◽  
J. M. Roper ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Substrate Surface ◽  
Residual Resistivity ◽  
Yttria Stabilized Zirconia ◽  
Room Temperature Resistivity ◽  
Stabilized Zirconia ◽  
Residual Resistivity Ratio ◽  
Resistivity Ratio ◽  
Ion Beam Assisted Deposition

Highly conductive biaxially textured RuO2 thin films were deposited on technically important SiO2/Si substrates by pulsed laser deposition, where yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted-deposition (IBAD) was used as a template to enhance the biaxial texture of RuO2 on SiO2/Si. The biaxially oriented RuO2 had a room-temperature resistivity of 37 μΔ-cm and residual resistivity ratio above 2. We then deposited Ba0.5Sr0.5TiO3 thin films on RuO2/IBAD-YSZ/SiO2/Si. The Ba0.5Sr0.5TiO3 had a pure (111) orientation normal to the substrate surface and a dielectric constant above 360 at 100 kHz.

Growth of Biaxially Textured Yttria-Stabilized Zirconia Thin Films on Si(111) Substrate by Ion Beam Assisted Deposition

2000 ◽  
Vol 17 (3) ◽  
pp. 221-223
Author(s):  
Hai-Chuan Mu (Hai-Cuan Mu) ◽  
Cong-Xin Ren ◽  
Bing-Yao Jiang ◽  
Xing-Zhao Ding ◽  
Yue-Hui Yu ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Ion Beam Assisted Deposition

An orientation competition in yttria-stabilized zirconia thin films fabricated by ion beam assisted sputtering deposition

2011 ◽  
Vol 520 (3) ◽  
pp. 1115-1119 ◽  
Author(s):  
Z. Wang ◽  
Z.J. Zhao ◽  
B.J. Yan ◽  
Y.L. Li ◽  
F. Feng ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Sputtering Deposition
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