Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry

Yi-Ming Xiong; Paul G. Snyder; John A. Woollam; G. A. Al-Jumaily; F. J. Gagliardi; L. J. Mizerka

doi:10.1002/sia.740180211

Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry

Surface and Interface Analysis ◽

10.1002/sia.740180211 ◽

1992 ◽

Vol 18 (2) ◽

pp. 124-128 ◽

Cited By ~ 6

Author(s):

Yi-Ming Xiong ◽

Paul G. Snyder ◽

John A. Woollam ◽

G. A. Al-Jumaily ◽

F. J. Gagliardi ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Silicon Oxynitride ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization of polycrystalline ZnSe1−xTex thin films using variable angle spectroscopic ellipsometry and spectrophotmetery techniques

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2015.06.048 ◽

2015 ◽

Vol 39 ◽

pp. 735-741 ◽

Cited By ~ 10

Author(s):

E.R. Shaaban ◽

M. El-Hagary ◽

M. Emam-Ismail ◽

A.M. Abd Elnaeim ◽

S.H. Moustafa ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization of ferroelectric PZT thin films by variable angle spectroscopic ellipsometry

10.1117/12.2064658 ◽

2014 ◽

Author(s):

Md. Shafiqur Rahman ◽

Carlos D. Garcia ◽

Amar Bhalla ◽

Ruyan Guo

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Pzt Thin Films ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization by variable angle spectroscopic ellipsometry of nitrogen-doped Mg Zn1−O thin films prepared by the plasma-assisted reactive evaporation method

Thin Solid Films ◽

10.1016/j.tsf.2014.02.091 ◽

2014 ◽

Vol 571 ◽

pp. 615-619 ◽

Cited By ~ 3

Author(s):

Takami Abe ◽

Akira Nakagawa ◽

Michiko Nakagawa ◽

Tetsuya Chiba ◽

Shuzo Takahashi ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Evaporation Method ◽

Nitrogen Doped ◽

Reactive Evaporation ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization of the annealing effect on Ge5Te20Se75 thin films by variable angle of-incidence spectroscopic ellipsometry

Optik ◽

10.1016/j.ijleo.2016.01.064 ◽

2016 ◽

Vol 127 (8) ◽

pp. 3871-3877 ◽

Cited By ~ 10

Author(s):

F. Abdel-Wahab ◽

A. Merazga ◽

M.S. Rasheedy ◽

A.A. Montaser

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Annealing Effect ◽

Angle Of Incidence ◽

Variable Angle

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Optical characterization of diamond-like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

Diamond and Related Materials ◽

10.1016/s0925-9635(01)00528-3 ◽

2002 ◽

Vol 11 (1) ◽

pp. 105-117 ◽

Cited By ~ 20

Author(s):

D. Franta ◽

L. Zajı́čková ◽

I. Ohlı́dal ◽

J. Janča ◽

K. Veltruská

Keyword(s):

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Carbon Films ◽

Diamond Like Carbon ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization of InGaAs–GaAs multiple quantum wells using variable angle spectroscopic ellipsometry for designing tunable modulators

Journal of Applied Physics ◽

10.1063/1.364125 ◽

1997 ◽

Vol 81 (1) ◽

pp. 497-501 ◽

Cited By ~ 1

Author(s):

S. K. Cheung ◽

H. Wang ◽

W. Huang ◽

F. Jain

Keyword(s):

Quantum Wells ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Multiple Quantum Wells ◽

Multiple Quantum ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Characterization of silica xerogel films by variable-angle spectroscopic ellipsometry and infrared spectroscopy

Semiconductor Science and Technology ◽

10.1088/0268-1242/16/9/312 ◽

2001 ◽

Vol 16 (9) ◽

pp. 806-811 ◽

Cited By ~ 18

Author(s):

C Himcinschi ◽

M Friedrich ◽

C Murray ◽

I Streiter ◽

S E Schulz ◽

...

Keyword(s):

Infrared Spectroscopy ◽

Spectroscopic Ellipsometry ◽

Silica Xerogel ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry ◽

Xerogel Films

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Optical characterization of CuIn1−xGaxSe2 alloy thin films by spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.1581345 ◽

2003 ◽

Vol 94 (2) ◽

pp. 879-888 ◽

Cited By ~ 182

Author(s):

P. D. Paulson ◽

R. W. Birkmire ◽

W. N. Shafarman

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization

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Variable angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings

10.1117/12.192176 ◽

1994 ◽

Cited By ~ 2

Author(s):

Alexander Zuber ◽

Norbert Kaiser ◽

Jean-Louis P. Stehle

Keyword(s):

Spectroscopic Ellipsometry ◽

Dielectric Coatings ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry ◽

Deep Uv

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Optical characterization of thin films of some phthalocyanines by spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/0040-6090(90)90204-q ◽

1990 ◽

Vol 188 (1) ◽

pp. 181-192 ◽

Cited By ~ 14

Author(s):

J Mårtensson ◽

H Arwin

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization

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