Nondestructive and quantitative depth profiling analysis of ion bombarded Ta2O5 surfaces by medium energy ion scattering spectroscopy

1995 ◽  
Vol 13 (3) ◽  
pp. 1325-1330 ◽  
Author(s):  
J. C. Lee ◽  
C. S. Chung ◽  
H. J. Kang ◽  
Y. P. Kim ◽  
H. K. Kim ◽  
...  
Keyword(s):  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering ◽  
Profiling Analysis

Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

2016 ◽  
Vol 48 (7) ◽  
pp. 436-439 ◽  
Author(s):  
Laurent Fauquier ◽  
Bernard Pelissier ◽  
Denis Jalabert ◽  
François Pierre ◽  
Delphine Doloy ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Medium Energy Ion Scattering ◽  
Profiling Analysis

Depth-profiling the composition of bimetallic nanoparticles using medium energy ion scattering

2011 ◽  
Vol 605 (1-2) ◽  
pp. 220-224 ◽  
Author(s):  
Johan Gustafson ◽  
Andrew R. Haire ◽  
Christopher J. Baddeley
Keyword(s):  
Bimetallic Nanoparticles ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering

Traceable thickness measurement of ultra-thin HfO2 films by medium-energy ion scattering spectroscopy

Metrologia ◽  
2020 ◽  
Vol 57 (2) ◽  
pp. 025001 ◽  
Author(s):  
Kyung Joong Kim ◽  
Tae Gun Kim ◽  
Ji-Hwan Kwon ◽  
Hyun Ruh ◽  
Kyungsu Park ◽  
...  
Keyword(s):  
Thickness Measurement ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy

2015 ◽  
Vol 118 (13) ◽  
pp. 135706 ◽  
Author(s):  
Won Ja Min ◽  
Kyungsu Park ◽  
Kyu-Sang Yu ◽  
Sungjung Joo ◽  
Yong-Sung Kim ◽  
...  
Keyword(s):  
Time Of Flight ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Rumpled relaxation of TiC(001) and TaC(001) determined by high-resolution medium-energy ion scattering spectroscopy

2000 ◽  
Vol 61 (3) ◽  
pp. 1748-1751 ◽  
Author(s):  
Yoshiaki Kido ◽  
Tomoaki Nishimura ◽  
Yasushi Hoshino ◽  
Shigeki Otani ◽  
Ryutaro Souda
Keyword(s):  
High Resolution ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Observation of Incomplete Surface Melting of Si Using Medium-Energy Ion Scattering Spectroscopy

2000 ◽  
Vol 39 (Part 1, No. 7B) ◽  
pp. 4421-4424 ◽  
Author(s):  
Koji Sumitomo ◽  
Hiroki Hibino ◽  
Yoshikazu Homma ◽  
Toshio Ogino
Keyword(s):  
Surface Melting ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering
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