Copper film deposition using a helium dielectric barrier discharge jet

Tsung‐Chan Tsai; Katelyn Mcintyre; Matthew Burnette; David Staack

doi:10.1002/ppap.201900251

Copper film deposition using a helium dielectric barrier discharge jet

Plasma Processes and Polymers ◽

10.1002/ppap.201900251 ◽

2020 ◽

Vol 17 (11) ◽

pp. 1900251

Author(s):

Tsung‐Chan Tsai ◽

Katelyn Mcintyre ◽

Matthew Burnette ◽

David Staack

Keyword(s):

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Copper Film ◽

Film Deposition ◽

Dielectric Barrier

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Impact of hexamethyldisiloxane admixtures on the discharge characteristics of a dielectric barrier discharge in argon for thin film deposition

Contributions to Plasma Physics ◽

10.1002/ctpp.201700060 ◽

2017 ◽

Vol 58 (5) ◽

pp. 337-352 ◽

Cited By ~ 9

Author(s):

Detlef Loffhagen ◽

Markus M. Becker ◽

Andreas K. Czerny ◽

Jens Philipp ◽

Claus-Peter Klages

Keyword(s):

Thin Film ◽

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Thin Film Deposition ◽

Film Deposition ◽

Discharge Characteristics ◽

Dielectric Barrier

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Polymer film deposition on agar using a dielectric barrier discharge jet and its bacterial growth inhibition

Applied Physics Letters ◽

10.1063/1.4747806 ◽

2012 ◽

Vol 101 (7) ◽

pp. 074107 ◽

Cited By ~ 11

Author(s):

T.-C. Tsai ◽

J. Cho ◽

K. Mcintyre ◽

Y.-K. Jo ◽

D. Staack

Keyword(s):

Growth Inhibition ◽

Polymer Film ◽

Dielectric Barrier Discharge ◽

Bacterial Growth ◽

Barrier Discharge ◽

Film Deposition ◽

Dielectric Barrier ◽

Bacterial Growth Inhibition

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Development of dielectric barrier discharge plasma processing apparatus for mass spectrometry and thin film deposition

Review of Scientific Instruments ◽

10.1063/1.2751408 ◽

2007 ◽

Vol 78 (7) ◽

pp. 075103 ◽

Cited By ~ 21

Author(s):

Abhijit Majumdar ◽

Rainer Hippler

Keyword(s):

Thin Film ◽

Mass Spectrometry ◽

Dielectric Barrier Discharge ◽

Discharge Plasma ◽

Barrier Discharge ◽

Thin Film Deposition ◽

Film Deposition ◽

Dielectric Barrier Discharge Plasma ◽

Dielectric Barrier ◽

Barrier Discharge Plasma

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Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(02)00050-x ◽

2002 ◽

Vol 11 (8) ◽

pp. 1491-1495 ◽

Cited By ~ 28

Author(s):

Dongping Liu ◽

Yong Xu ◽

Xuefeng Yang ◽

Shiji Yu ◽

Qi Sun ◽

...

Keyword(s):

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Carbon Film ◽

Film Deposition ◽

Diamond Like Carbon ◽

Dielectric Barrier ◽

Diamond Like Carbon Film

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Film Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure in He/O2/HMDSO and He/N2O/HMDSO mixtures

Plasma Processes and Polymers ◽

10.1002/ppap.200931102 ◽

2009 ◽

Vol 6 (S1) ◽

pp. S514-S518 ◽

Cited By ~ 19

Author(s):

Igor Vinogradov ◽

Achim Lunk

Keyword(s):

Dielectric Barrier Discharge ◽

Atmospheric Pressure ◽

Barrier Discharge ◽

Film Deposition ◽

Dielectric Barrier

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Theoretical analysis of ion kinetic energies and DLC film deposition by CH 4 + Ar (He) dielectric barrier discharge plasmas

Chinese Physics ◽

10.1088/1009-1963/16/9/052 ◽

2007 ◽

Vol 16 (9) ◽

pp. 2809-2813 ◽

Cited By ~ 1

Author(s):

Liu Yan-Hong ◽

Zhang Jia-Liang ◽

Ma Teng-Cai ◽

Li Jian ◽

Liu Dong-Ping

Keyword(s):

Theoretical Analysis ◽

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Film Deposition ◽

Dielectric Barrier ◽

Dlc Film ◽

Discharge Plasmas

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Plasma states and carbon film deposition in glow discharge connected to dielectric barrier discharge

Vacuum ◽

10.1016/j.vacuum.2018.08.030 ◽

2018 ◽

Vol 157 ◽

pp. 155-158 ◽

Cited By ~ 2

Author(s):

Takanori Yamamoto ◽

Riichiro Ohta

Keyword(s):

Glow Discharge ◽

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Carbon Film ◽

Film Deposition ◽

Dielectric Barrier

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Diagnostics of SiCOH-Film-Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure

Plasma Processes and Polymers ◽

10.1002/ppap.200731202 ◽

2007 ◽

Vol 4 (S1) ◽

pp. S435-S439 ◽

Cited By ~ 11

Author(s):

Igor Vinogradov ◽

Daniel Zimmer ◽

Achim Lunk

Keyword(s):

Dielectric Barrier Discharge ◽

Atmospheric Pressure ◽

Barrier Discharge ◽

Film Deposition ◽

Dielectric Barrier

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Thin Film Deposition Using a Dielectric‐barrier Discharge

Journal of The Electrochemical Society ◽

10.1149/1.2086046 ◽

1991 ◽

Vol 138 (9) ◽

pp. 2741-2744 ◽

Cited By ~ 5

Author(s):

M. Segers ◽

S. K. Dhali

Keyword(s):

Thin Film ◽

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Thin Film Deposition ◽

Film Deposition ◽

Dielectric Barrier

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SiO2-like film deposition by dielectric barrier discharge plasma gun at ambient temperature under an atmospheric pressure

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2348724 ◽

2006 ◽

Vol 24 (6) ◽

pp. 2082-2086 ◽

Cited By ~ 10

Author(s):

Qiang Chen ◽

Yuefei Zhang ◽

Erli Han ◽

Yuanjing Ge

Keyword(s):

Ambient Temperature ◽

Dielectric Barrier Discharge ◽

Atmospheric Pressure ◽

Discharge Plasma ◽

Barrier Discharge ◽

Film Deposition ◽

Dielectric Barrier Discharge Plasma ◽

Dielectric Barrier ◽

Plasma Gun ◽

Barrier Discharge Plasma

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