Film Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure in He/O2/HMDSO and He/N2O/HMDSO mixtures

2009 ◽  
Vol 6 (S1) ◽  
pp. S514-S518 ◽  
Author(s):  
Igor Vinogradov ◽  
Achim Lunk
2015 ◽  
Vol 9 ◽  
pp. 74-81 ◽  
Author(s):  
A. Ozkan ◽  
T. Dufour ◽  
G. Arnoult ◽  
P. De Keyzer ◽  
A. Bogaerts ◽  
...  

2016 ◽  
Vol 44 (11) ◽  
pp. 2576-2588 ◽  
Author(s):  
Cong-Wei Yao ◽  
Zheng-Shi Chang ◽  
Hengchi Ma ◽  
Guimin Xu ◽  
Haibao Mu ◽  
...  

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