Development of dielectric barrier discharge plasma processing apparatus for mass spectrometry and thin film deposition
2007 ◽
Vol 78
(7)
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pp. 075103
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2006 ◽
Vol 24
(6)
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pp. 2082-2086
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2009 ◽
Vol 129
(6)
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pp. 403-408
2014 ◽
Vol 3
(8)
◽
pp. 25
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