Diagnostics of SiCOH-Film-Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure
2007 ◽
Vol 4
(S1)
◽
pp. S435-S439
◽
2009 ◽
Vol 6
(S1)
◽
pp. S514-S518
◽
2006 ◽
Vol 24
(6)
◽
pp. 2082-2086
◽
Keyword(s):
2010 ◽
Vol 12
(5)
◽
pp. 601-607
◽
Keyword(s):
2016 ◽
Vol 44
(11)
◽
pp. 2576-2588
◽
2007 ◽
Vol 46
(No. 38)
◽
pp. L942-L944
◽
Keyword(s):