Diagnostics of SiCOH-Film-Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure

2007 ◽  
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pp. S435-S439 ◽  
Author(s):  
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Daniel Zimmer ◽  
Achim Lunk
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Vol 9 ◽  
pp. 74-81 ◽  
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A. Ozkan ◽  
T. Dufour ◽  
G. Arnoult ◽  
P. De Keyzer ◽  
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2016 ◽  
Vol 44 (11) ◽  
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