SiO2-like film deposition by dielectric barrier discharge plasma gun at ambient temperature under an atmospheric pressure

2006 ◽  
Vol 24 (6) ◽  
pp. 2082-2086 ◽  
Author(s):  
Qiang Chen ◽  
Yuefei Zhang ◽  
Erli Han ◽  
Yuanjing Ge
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