scholarly journals A Platform for CMOS Compatible Plasmonics: High Plasmonic Quality Titanium Nitride Thin Films on Si (001) with an MgO Interlayer

2021 ◽  
pp. 2000210
Author(s):  
Kai Ding ◽  
Dhruv Fomra ◽  
Alexander V. Kvit ◽  
Hadis Morkoç ◽  
Nathaniel Kinsey ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Cmos Compatible

scholarly journals Correlation between electrical direct current resistivity and plasmonic properties of CMOS compatible titanium nitride thin films

2018 ◽  
Vol 26 (8) ◽  
pp. 9813 ◽  
Author(s):  
S. Viarbitskaya ◽  
J. Arocas ◽  
O. Heintz ◽  
G. Colas-Des-Francs ◽  
D. Rusakov ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Direct Current ◽  
Cmos Compatible

GLANCING INCIDENCE X-RAY STUDIES OF TITANIUM NITRIDE THIN FILMS USING A NEW MULTIPURPOSE LABORATORY SPECTROMETER

1989 ◽  
Vol 50 (C7) ◽  
pp. C7-169-C7-173
Author(s):  
R.C BUSCHERT ◽  
P. N. GIBSON ◽  
W. GISSLER ◽  
J. HAUPT ◽  
T. A. CRABB
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
X Ray

Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition

2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

CMOS-Compatible Synthesis of Large-Area, High-Mobility Graphene by Chemical Vapor Deposition of Acetylene on Cobalt Thin Films

ACS Nano ◽  
2011 ◽  
Vol 5 (9) ◽  
pp. 7198-7204 ◽  
Author(s):  
Michael E. Ramón ◽  
Aparna Gupta ◽  
Chris Corbet ◽  
Domingo A. Ferrer ◽  
Hema C. P. Movva ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Mobility ◽  
Chemical Vapor ◽  
Large Area ◽  
Cobalt Thin Films ◽  
Cmos Compatible

Epitaxy of titanium nitride thin films grown by nitrogen implantation

1996 ◽  
Vol 281-282 ◽  
pp. 32-35 ◽  
Author(s):  
Y. Kasukabe ◽  
J. Ootubo ◽  
S. Takeda ◽  
S. Nagata ◽  
M. Kishimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Nitrogen Implantation

Investigation of Post Annealed Titanium Nitride Thin Films Deposited with Magneto-Sputtering

2021 ◽  
Vol 10 (1) ◽  
pp. 20200213
Author(s):  
Rutvik Lathia ◽  
Kamlesh V. Chauhan ◽  
Kevin Dobariya ◽  
Ankit Patel ◽  
Vishal Parmar
Keyword(s):  
Thin Films ◽  
Titanium Nitride

scholarly journals Reduced optical losses in refractory plasmonic titanium nitride thin films deposited with molecular beam epitaxy

2020 ◽  
Vol 10 (10) ◽  
pp. 2679 ◽  
Author(s):  
Krishna Chand Maurya ◽  
Vladimir M. Shalaev ◽  
Alexandra Boltasseva ◽  
Bivas Saha
Keyword(s):  
Thin Films ◽  
Molecular Beam Epitaxy ◽  
Titanium Nitride ◽  
Molecular Beam ◽  
Optical Losses
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