Investigation of Post Annealed Titanium Nitride Thin Films Deposited with Magneto-Sputtering
1989 ◽
Vol 50
(C7)
◽
pp. C7-169-C7-173
Keyword(s):
1986 ◽
Vol 4
(6)
◽
pp. 2463-2469
◽
Keyword(s):
Keyword(s):