History and Milestones of Cluster Beam Development

2015 ◽  
pp. 38-75
Keyword(s):  
Vacuum ◽  
1978 ◽  
Vol 28 (10-11) ◽  
pp. 485 ◽  
Author(s):  
Wolfgang Obert
Keyword(s):  

1987 ◽  
Vol 108 ◽  
Author(s):  
Hiroaki Usui ◽  
Kouji Numata ◽  
Hitoshi Dohmoto ◽  
Isao Yamada ◽  
Toshinori Takagi

ABSTRACTPolyethylene thin films were deposited by the ionized cluster beam (ICB) method. The dielectric, resistivity, and breakdown field measurements showed that the ICB polyethylene films have excellent properties as an electrical insulator. The characteristics of Au/polyethylene/Si MIS diodes and MISFErs indicated that the ICB method can control the film-substrate interface property. The SIMS and ESCAan alyses showed that the ICB films have pure and stable chemical structure.


1990 ◽  
Vol 5 (7) ◽  
pp. 771-781 ◽  
Author(s):  
S E Huq ◽  
R A McMahon ◽  
H Ahmed
Keyword(s):  

2013 ◽  
Vol 47 (1) ◽  
pp. 015301 ◽  
Author(s):  
C Ghisleri ◽  
F Borghi ◽  
L Ravagnan ◽  
A Podestà ◽  
C Melis ◽  
...  
Keyword(s):  

1994 ◽  
Vol 64 (10) ◽  
pp. 1212-1214 ◽  
Author(s):  
J. F. Roux ◽  
B. Cabaud ◽  
G. Fuchs ◽  
D. Guillot ◽  
A. Hoareau ◽  
...  

2011 ◽  
Vol 21 (4) ◽  
pp. 045013 ◽  
Author(s):  
Mattia Marelli ◽  
Giorgio Divitini ◽  
Cristian Collini ◽  
Luca Ravagnan ◽  
Gabriele Corbelli ◽  
...  

Author(s):  
T. Takagi ◽  
I. Yamada ◽  
K. Yanagawa

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