SIMOX
Latest Publications

TOTAL DOCUMENTS

8

(FIVE YEARS 0)

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0

(FIVE YEARS 0)

Published By IET

9780863413346

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electrical and optical characterisation of SIMOX substrates

SIMOX ◽

10.1049/pbep004e_ch5 ◽

2011 ◽

pp. 77-114

Author(s):

H. Hovel

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SIMOX/SOI processes: flexibility based on thermodynamic considerations

SIMOX ◽

10.1049/pbep004e_ch4 ◽

2011 ◽

pp. 63-76

Author(s):

A. Ogura

Keyword(s):

Simox Soi

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Overview of SIMOX technology: historical perspective

SIMOX ◽

10.1049/pbep004e_ch2 ◽

2011 ◽

pp. 7-18

Author(s):

K. Izumi

Keyword(s):

Historical Perspective

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Back Matter

SIMOX ◽

10.1049/pbep004e_bm ◽

2011 ◽

pp. 115-136

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Front Matter

SIMOX ◽

10.1049/pbep004e_fm ◽

2011 ◽

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Introduction

SIMOX ◽

10.1049/pbep004e_ch1 ◽

2011 ◽

pp. 1-6

Author(s):

M. Anc

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Fundamental processes in SIMOX layer formation: ion implantation and oxide growth

SIMOX ◽

10.1049/pbep004e_ch3 ◽

2011 ◽

pp. 19-62

Author(s):

P. Hemment

Keyword(s):

Ion Implantation ◽

Oxide Growth ◽

Layer Formation

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SIMOX material technology from R&D to advanced products

SIMOX ◽

10.1049/pbep004e_ch6 ◽

2011 ◽

pp. 115-136

Author(s):

D. Sadana

Keyword(s):

Material Technology

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