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scholarly journals Effect of co-implantation of nitrogen and fluorine on the fixed positive charge density of the buried oxide layer in SIMOX SOI materials

2013 ◽  
Vol 62 (11) ◽  
pp. 117303
Author(s):  
Zhang Bai-Qiang ◽  
Zheng Zhong-Shan ◽  
Yu Fang ◽  
Ning Jin ◽  
Tang Hai-Ma ◽  
...  
Keyword(s):  
Charge Density ◽  
Oxide Layer ◽  
Positive Charge ◽  
Buried Oxide ◽  
Fixed Positive Charge ◽  
Simox Soi

Radiation response of pseudo-MOS transistors fabricated in hardened fully-depleted SIMOX SOI wafers

2009 ◽  
Vol 33 (10) ◽  
pp. 866-869 ◽  
Author(s):  
Bi Da-Wei ◽  
Zhang Zheng-Xuan ◽  
Zhang Shuai ◽  
Chen Ming ◽  
Yu Wen-Jie ◽  
...  
Keyword(s):  
Radiation Response ◽  
Mos Transistors ◽  
Fully Depleted ◽  
Simox Soi

Optimized implant dose and energy to fabricate high-quality patterned SIMOX SOI materials

2004 ◽  
Vol 130 (3-4) ◽  
pp. 275-279 ◽  
Author(s):  
Yemin Dong ◽  
Jing Chen ◽  
Xiang Wang ◽  
Meng Chen ◽  
Xi Wang
Keyword(s):  
High Quality ◽  
Simox Soi

Effect of Hydrogen Implantation on SIMOX SOI Materials

2004 ◽  
Vol 21 (1) ◽  
pp. 149-152 ◽  
Author(s):  
Yi Wan-Bing ◽  
Chen Jing ◽  
Chen Meng ◽  
Wang Xi ◽  
Zou Shi-Chang
Keyword(s):  
Hydrogen Implantation ◽  
Simox Soi
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