Lithography
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scholarly journals Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

Lithography ◽  
10.5772/8172 ◽  
2010 ◽  
Author(s):  
N.I. Chkhalo ◽  
A.E. Pestov ◽  
N. N. ◽  
Salashchenko ◽  
M.N. Toropov
Keyword(s):  
Objective Lens ◽  
Ultrahigh Resolution

scholarly journals Nano-Crystalline Diamond Films for X-ray Lithography Mask

Lithography ◽  
10.5772/8178 ◽  
2010 ◽  
Author(s):  
Linjun Wang ◽  
Jian Huang ◽  
Ke Tang ◽  
Yiben Xi
Keyword(s):  
Diamond Films ◽  
X Ray ◽  
Nano Crystalline

scholarly journals Femtosecond Laser Nonlinear Lithography

Lithography ◽  
10.5772/8170 ◽  
2010 ◽  
Author(s):  
Hiroaki Nishiyama ◽  
Yoshinori Hirat
Keyword(s):  
Femtosecond Laser
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