scholarly journals Nano-Crystalline Diamond Films for X-ray Lithography Mask

Lithography ◽  
10.5772/8178 ◽  
2010 ◽  
Author(s):  
Linjun Wang ◽  
Jian Huang ◽  
Ke Tang ◽  
Yiben Xi
Keyword(s):  
Diamond Films ◽  
X Ray ◽  
Nano Crystalline

Selected Interlayer of Diamond Deposition on γ-TiAl Intermetallic Compounds Prepared by Microwave-Plasma Assisted CVD

2009 ◽  
Vol 631-632 ◽  
pp. 425-430
Author(s):  
Saleh B. Abu Suilik ◽  
Masayuki Ohshima ◽  
Toshimitsu Tetsui ◽  
Kazuhiro Hasezaki
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Diamond Coatings ◽  
X Ray Diffraction ◽  
Diamond Deposition ◽  
X Ray ◽  
Nano Crystalline ◽  
Scanning Electron

Several diamond coatings were performed on -TiAl substrates by a microwave-plasma assisted CVD, which were made directly to the substrate and indirectly to the TiC, Ti5Si3, Al2O3+TiO2 and Si layers on the substrate. The direct coatings suffered from severe delamination and cracks. The deposited layers on TiC and Ti5Si3 layers partially delaminated, while those on Al2O3+TiO2 and Si layers adhered well without delamination. All the diamond films deposited were characterized using scanning electron microscopy, Raman spectroscopy, and X-ray diffraction. Raman spectra showed that poly- and nano-crystalline diamond films were obtained for the coatings of -TiAl.

Growth, characterization, optical and X-ray absorption studies of nano-crystalline diamond films

2000 ◽  
Vol 9 (3-6) ◽  
pp. 877-882 ◽  
Author(s):  
L.C. Chen ◽  
T.Y. Wang ◽  
J.R. Yang ◽  
K.H. Chen ◽  
D.M. Bhusari ◽  
...  
Keyword(s):  
Diamond Films ◽  
X Ray ◽  
Nano Crystalline ◽  
Growth Characterization ◽  
Absorption Studies ◽  
X Ray Absorption

Nano-Crystalline Diamond Films Deposited on Copper Substrate by MPCVD Method

2011 ◽  
Vol 117-119 ◽  
pp. 1310-1314
Author(s):  
Xing Rui Li ◽  
Xin Wei Shi ◽  
Ning Yao ◽  
Xin Chang Wang
Keyword(s):  
Diamond Film ◽  
Deposition Time ◽  
Microwave Plasma ◽  
Copper Substrate ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Annealing Process ◽  
Adhesive Properties ◽  
Plasma Chemical Vapor Deposition ◽  
Nano Crystalline

Nano-crystalline diamond (NCD) films with good adhesion were deposited on flexible copper substrate with Ni interlayer by Microwave Plasma Chemical Vapor Deposition (MPCVD). In this paper, two-stage method was used to improve the adhesion between the copper substrates and the diamond films. The effect of deposition time of the first stage on the morphology, crystal structure, non-diamond phase and adhesive properties of diamond films was investigated. The performance and structure of the diamond films were studied by Scanning Electron Microscope (SEM), Raman Spectroscopy (Raman) and X-Ray Diffraction (XRD). The results showed that the films were nano-crystalline diamond films positively. Impress method was used to examine the adhesion between diamond film and the substrate. When deposition time is 1.5h, the adhesion between diamond film and the copper substrate is better than the others. When it was 2.5h or longer, because the graphite layers existed as intermediate, the adherence between the diamond films and copper substrates was very poor. Therefore, the diamond films were easily peeled off from the substrates. Otherwise, the second stage called annealing process after the deposition played an important role to the adhesion. The films would be easily peeled off by curling without the annealing process.

Highly transparent nano-crystalline diamond films via substrate pretreatment and methane fraction optimization

1998 ◽  
Vol 332 (1-2) ◽  
pp. 34-39 ◽  
Author(s):  
K.H. Chen ◽  
D.M. Bhusari ◽  
J.R. Yang ◽  
S.T. Lin ◽  
T.Y. Wang ◽  
...  
Keyword(s):  
Diamond Films ◽  
Substrate Pretreatment ◽  
Nano Crystalline

Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements

2001 ◽  
Vol 10 (3-7) ◽  
pp. 750-754 ◽  
Author(s):  
N.G. Ferreira ◽  
E. Abramof ◽  
E.J. Corat ◽  
N.F. Leite ◽  
V.J. Trava-Airoldi
Keyword(s):  
Diamond Films ◽  
X Ray Diffraction ◽  
Boron Doped Diamond ◽  
X Ray ◽  
Boron Doped ◽  
Stress Study

Bilayer SiNX/Diamond Films for X-Ray Lithography Mask

1999 ◽  
Vol 38 (Part 1, No. 11) ◽  
pp. 6530-6534 ◽  
Author(s):  
Bohr-Ran Huang ◽  
Jeng-Tzong Sheu ◽  
Chia-Haur Wu
Keyword(s):  
Diamond Films ◽  
X Ray

scholarly journals Synchrotron Nano-Diffraction Study of Thermally Treated Asbestos Tremolite from Val d’Ala, Turin (Italy)

Minerals ◽  
2018 ◽  
Vol 8 (8) ◽  
pp. 311 ◽  
Author(s):  
Carlotta Giacobbe ◽  
Jonathan Wright ◽  
Dario Di Giuseppe ◽  
Alessandro Zoboli ◽  
Mauro Zapparoli ◽  
...  
Keyword(s):  
Crystal Structure ◽  
Heat Treatment ◽  
Risk Management ◽  
Structure Analysis ◽  
X Rays ◽  
X Ray Diffraction ◽  
X Ray ◽  
Adverse Health Effects ◽  
Nano Crystalline ◽  
Original Fibre

Nowadays, due to the adverse health effects associated with exposure to asbestos, its removal and thermal inertization has become one of the most promising ways for reducing waste risk management. Despite all the advances in structure analysis of fibers and characterization, some problems still remain that are very hard to solve. One challenge is the structure analysis of natural micro- and nano-crystalline samples, which do not form crystals large enough for single-crystal X-ray diffraction (SC-XRD), and their analysis is often hampered by reflection overlap and the coexistence of multiple fibres linked together. In this paper, we have used nano-focused synchrotron X-rays to refine the crystal structure of a micrometric tremolite fibres from Val d’Ala, Turin (Italy) after various heat treatment. The structure of the original fibre and after heating to 800 °C show minor differences, while the fibre that was heated at 1000 °C is recrystallized into pyroxene phases and cristobalite.

Preparation and Properties of Nano-Crystalline Cellulose Electro-Rheological Fluid

2015 ◽  
Vol 815 ◽  
pp. 217-221
Author(s):  
Ling Li Xu ◽  
Xing Ling Shi ◽  
Qing Liang Wang
Keyword(s):  
Room Temperature ◽  
Silicone Oil ◽  
Strong Acid ◽  
Crystalline Cellulose ◽  
Methyl Silicone ◽  
Shearing Stress ◽  
X Ray Diffraction ◽  
X Ray ◽  
Nano Crystalline ◽  
Transmission Electron

nanocrystalline cellulose (NCC) was prepared from micro-crystalline cellulose (MCC) by strong acid hydrolysis. The characteristics of such particle were studied by transmission electron microscopy, X-ray diffraction and Fourier transform infrared spectroscopy. Electro-rheological fluids (ERF) were prepared by dispersing NCC and MCC in methyl-silicone oil, and their ER effects were measured. Experimental results indicated that NCC ERF exhibited a remarkable ER effect. The highest static shearing stress of NCC ERF (3.5 g/ml) was 5.1 kPa at the room temperature under a 4 .2 kV/mm electric field, increased about 5.5 times compared to MCC ERF, and sedimentation of NCC ERF was not observed even after 60 days.

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