CO2 Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography

Lithography ◽  
10.5772/8175 ◽  
2010 ◽  
Author(s):  
Akira Endo
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Tin Plasma

Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source

2008 ◽  
Vol 92 (4) ◽  
pp. 767-772 ◽  
Author(s):  
D. Nakamura ◽  
K. Tamaru ◽  
T. Akiyama ◽  
A. Takahashi ◽  
T. Okada
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Tin Plasma

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
Takashi Suganuma ◽  
Tamotsu Abe ◽  
Hiroshi Komori ◽  
Yuichi Takabayashi ◽  
Akira Endo
Keyword(s):  
Light Source ◽  
Liquid Xenon ◽  
Euv Lithography ◽  
Laser Produced Plasma

A comparative study on the performance of a xenon capillaryZ-pinch EUV lithography light source using a pinhole camera

2006 ◽  
Vol 15 (3) ◽  
pp. 322-327 ◽  
Author(s):  
Inho Song ◽  
Kazuhiro Iwata ◽  
Yusuke Homma ◽  
Smruti R Mohanty ◽  
Masato Watanabe ◽  
...  
Keyword(s):  
Comparative Study ◽  
Light Source ◽  
Pinhole Camera ◽  
Euv Lithography

Laser-produced-plasma light source for EUV lithography

2005 ◽  
Author(s):  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Hiroshi Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Metrology of laser-produced plasma light source for EUV lithography

2005 ◽  
Author(s):  
N. R. Boewering ◽  
J. R. Hoffman ◽  
O. V. Khodykin ◽  
C. L. Rettig ◽  
B. A. M. Hansson ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma
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