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Investigation of fabricating the films in the phase transition regime from amorphous to microcrystalline by MWECR CVD system

2010 ◽  
Author(s):  
Y. J. Xie ◽  
Y. H. Hu ◽  
R. X. Xiao ◽  
H. Gao ◽  
G. H. Chen ◽  
...  
Keyword(s):  
Phase Transition ◽  
Transition Regime ◽  
Mwecr Cvd

Study on an improved MWECR CVD system and preparation of silicon-substrate thin films

2008 ◽  
Vol 92 (10) ◽  
pp. 1183-1187
Author(s):  
Xin-Hong Zhu ◽  
Guang-Hua Chen ◽  
Mao-Sheng Zheng
Keyword(s):  
Thin Films ◽  
Silicon Substrate ◽  
Mwecr Cvd

Influence of the deposition pressure on the preparation of μc-Si:H thin films in hot-wire-assisted MWECR-CVD system

Vacuum ◽  
2008 ◽  
Vol 83 (2) ◽  
pp. 386-390 ◽  
Author(s):  
Xiu-Hong Zhu ◽  
Guang-Hua Chen ◽  
Mao-Sheng Zheng
Keyword(s):  
Thin Films ◽  
Hot Wire ◽  
Deposition Pressure ◽  
Mwecr Cvd

Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system

2006 ◽  
Vol 15 (4) ◽  
pp. 866-871 ◽  
Author(s):  
He Bin ◽  
Chen Guang-Hua ◽  
Zhu Xiu-Hong ◽  
Zhang Wen-Li ◽  
Ding Yi ◽  
...  
Keyword(s):  
Silicon Films ◽  
Hot Wire ◽  
Microcrystalline Silicon ◽  
Mwecr Cvd

scholarly journals Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVD

2006 ◽  
Vol 55 (11) ◽  
pp. 6147
Author(s):  
Liu Guo-Han ◽  
Ding Yi ◽  
Zhu Xiu-Hong ◽  
Chen Guang-Hua ◽  
He De-Yan
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Mwecr Cvd

Influence of hot wire on the formation of microcrystalline silicon in MWECR–CVD system

Vacuum ◽  
2006 ◽  
Vol 80 (5) ◽  
pp. 421-425 ◽  
Author(s):  
Zhu Xiu-Hong ◽  
Chen Guang-Hua ◽  
Ding Yi ◽  
Ma Zhan-Jie ◽  
Liu Guo-Han ◽  
...  
Keyword(s):  
Hot Wire ◽  
Microcrystalline Silicon ◽  
Mwecr Cvd

Nanomorph Silicon Thin Films Prepared by Using an HW-MWECR CVD System

2005 ◽  
Vol 22 (5) ◽  
pp. 1260-1263 ◽  
Author(s):  
Hu Yue-Hui ◽  
Chen Guang-Hua ◽  
Zhou Jian-Er ◽  
Rong Yan-Dong ◽  
Li Ying ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Thin Films ◽  
Mwecr Cvd

Improvement on the conventional MWECR-CVD system and preparation of hydrogenated amorphous silicon films

Vacuum ◽  
2005 ◽  
Vol 77 (3) ◽  
pp. 355-358
Author(s):  
Chen Guang-Hua ◽  
Zhu Xiu-Hong ◽  
Yin Sheng-Yi ◽  
Hu Yue-Hui ◽  
Zhang Wen-Li
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous ◽  
Mwecr Cvd

scholarly journals Investigation of a-Si:H film characteristics influenced by magnetic field gradient in MWECR CVD plasma system

2004 ◽  
Vol 53 (7) ◽  
pp. 2263
Author(s):  
Hu Yue-Hui ◽  
Yin Sheng-Yi ◽  
Chen Guang-Hua ◽  
Wu Yue-Ying ◽  
Zhou Xiao-Ming ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Field Gradient ◽  
Magnetic Field Gradient ◽  
Plasma System ◽  
Film Characteristics ◽  
Mwecr Cvd
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