Investigation of fabricating the films in the phase transition regime from amorphous to microcrystalline by MWECR CVD system
Keyword(s):
1995 ◽
Vol 79
(1-2)
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pp. 299-312
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Keyword(s):
1993 ◽
Vol 21
(4)
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pp. 1876-1920
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1995 ◽
Vol 53
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pp. 502-503
1992 ◽
Vol 50
(1)
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pp. 432-433
1990 ◽
Vol 48
(4)
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pp. 172-173
1993 ◽
Vol 51
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pp. 890-891
1998 ◽
Vol 184-185
(1-2)
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pp. 1057-1060
1982 ◽
Vol 85
(1)
◽
pp. 297-303
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1982 ◽
Vol 85
(1)
◽
pp. 337-343
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