scholarly journals Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVD

2006 ◽  
Vol 55 (11) ◽  
pp. 6147
Author(s):  
Liu Guo-Han ◽  
Ding Yi ◽  
Zhu Xiu-Hong ◽  
Chen Guang-Hua ◽  
He De-Yan
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Mwecr Cvd

Optoelectronic characterization of microcrystalline silicon films

2002 ◽  
Vol 299-302 ◽  
pp. 756-760
Author(s):  
M Kunst ◽  
S von Aichberger ◽  
G Citarella ◽  
F Wünsch
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon

Analysis of free-carrier optical absorption used for characterization of microcrystalline silicon films

2001 ◽  
Vol 66 (1-4) ◽  
pp. 389-395 ◽  
Author(s):  
T Sameshima ◽  
K Saitoh ◽  
N Aoyama ◽  
M Tanda ◽  
M Kondo ◽  
...  
Keyword(s):  
Optical Absorption ◽  
Free Carrier ◽  
Silicon Films ◽  
Microcrystalline Silicon

Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system

2006 ◽  
Vol 15 (4) ◽  
pp. 866-871 ◽  
Author(s):  
He Bin ◽  
Chen Guang-Hua ◽  
Zhu Xiu-Hong ◽  
Zhang Wen-Li ◽  
Ding Yi ◽  
...  
Keyword(s):  
Silicon Films ◽  
Hot Wire ◽  
Microcrystalline Silicon ◽  
Mwecr Cvd

Reliable Characterization of Microcrystalline Silicon Films for Thin Film Transistor Applications

2008 ◽  
Vol 47 (9) ◽  
pp. 7308-7310 ◽  
Author(s):  
Alexey Abramov ◽  
Pere Roca i Cabarrocas ◽  
Kunal Girotra ◽  
Hong Chen ◽  
Seungkyu Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistor ◽  
Silicon Films ◽  
Microcrystalline Silicon

A simple quality factor for characterization of thin silicon films

2008 ◽  
Vol 354 (19-25) ◽  
pp. 2227-2230 ◽  
Author(s):  
J. Kočka ◽  
T. Mates ◽  
M. Ledinský ◽  
H. Stuchlíková ◽  
J. Stuchlík ◽  
...  
Keyword(s):  
Quality Factor ◽  
Silicon Films ◽  
Thin Silicon
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