icp dry etching
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Investigation of ICP dry etching of InAs/GaSb type-II superlattice LWIR photodetector

2021 ◽  
Author(s):  
Hyun Chul Jung ◽  
Ko Ku Kang ◽  
Seong Min Ryu ◽  
Tae Hee Lee ◽  
Jong Gi Kim ◽  
...  
Keyword(s):  
Dry Etching ◽  
Type Ii ◽  
Type Ii Superlattice ◽  
Icp Dry Etching

Study on ICP Dry Etching Technology for Nanostructure Photonic Device Fabrication

2019 ◽  
Vol 6 (2) ◽  
pp. 53-57
Author(s):  
Changzheng Sun ◽  
Jian Wang ◽  
Zhibiao Hao ◽  
Bing Xiong ◽  
Y. Luo
Keyword(s):  
Dry Etching ◽  
Device Fabrication ◽  
Photonic Device ◽  
Icp Dry Etching

The effects of ICP dry etching and HF wet etching on the morphology of SiO2 surface

2018 ◽  
Vol 5 (9) ◽  
pp. 095903
Author(s):  
Kazy F Shariar ◽  
Jie Zhang ◽  
Keith Coasey ◽  
Md Abu Sufian ◽  
Roddell Remy ◽  
...  
Keyword(s):  
Dry Etching ◽  
Wet Etching ◽  
Sio2 Surface ◽  
Icp Dry Etching

Effect of a Cooling Step Treatment on a High-Voltage GaN LED During ICP Dry Etching

2016 ◽  
Vol 46 (2) ◽  
pp. 941-946 ◽  
Author(s):  
Yen-Sheng Lin ◽  
Sheng-Yu Hsiao ◽  
Chun-Lung Tseng ◽  
Ching-Hsing Shen ◽  
Jung-Sheng Chiang
Keyword(s):  
High Voltage ◽  
Dry Etching ◽  
Gan Led ◽  
Icp Dry Etching

Dry etching and residue removal of functional polymer mixed with TiO2 microparticles via inductively coupled CF4/O2 plasma and ultrasonic-treated acetone for humidity sensor application

RSC Advances ◽  
2016 ◽  
Vol 6 (47) ◽  
pp. 41580-41586 ◽  
Author(s):  
Ming-Qing Liu ◽  
Cong Wang ◽  
Zhao Yao ◽  
Nam-Young Kim
Keyword(s):  
Humidity Sensor ◽  
Dry Etching ◽  
Functional Polymer ◽  
Removal Method ◽  
Sensor Application ◽  
Inductively Coupled ◽  
Residue Removal ◽  
O2 Plasma ◽  
Icp Dry Etching

An ICP dry etching and residue removal method of functional polymer mixed with TiO2 microparticles using for humidity sensor application.

GaN-based Ridge Waveguides with Very Smooth and Vertical Sidewalls by ICP Dry Etching and Chemical Etching

CLEO: 2015 ◽  
2015 ◽  
Author(s):  
Wanyong Li ◽  
Yi Luo ◽  
Bing Xiong ◽  
Changzheng Sun ◽  
Lai Wang ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Dry Etching ◽  
Ridge Waveguides ◽  
Icp Dry Etching

Study on ICP dry etching of GaSb and InAs/GaSb super lattices

2012 ◽  
Author(s):  
Xiangfeng Zhang ◽  
Lixue Zhang ◽  
Hongfei Zhang ◽  
Liang Zhang ◽  
Jiaxin Ding ◽  
...  
Keyword(s):  
Dry Etching ◽  
Icp Dry Etching

ICP dry etching ITO to improve the performance of GaN-based LEDs

2011 ◽  
Vol 32 (1) ◽  
pp. 014010 ◽  
Author(s):  
Lili Meng ◽  
Yixin Chen ◽  
Li Ma ◽  
Zike Liu ◽  
Guangdi Shen
Keyword(s):  
Dry Etching ◽  
Icp Dry Etching
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