Investigation of ICP dry etching of InAs/GaSb type-II superlattice LWIR photodetector

Infrared Technology and Applications XLVII ◽

10.1117/12.2588043 ◽

2021 ◽

Author(s):

Hyun Chul Jung ◽

Ko Ku Kang ◽

Seong Min Ryu ◽

Tae Hee Lee ◽

Jong Gi Kim ◽

...

Keyword(s):

Dry Etching ◽

Type Ii ◽

Type Ii Superlattice ◽

Icp Dry Etching

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Inductively coupled plasma (ICP) dry etching of type II InAs/GaSb superlattice for focal plane arrays

AOPC 2020: Display Technology; Photonic MEMS, THz MEMS, and Metamaterials; and AI in Optics and Photonics ◽

10.1117/12.2575638 ◽

2020 ◽

Author(s):

Fei Tao ◽

Xubo Zhu ◽

JinChun WANG ◽

Yingjie He ◽

Jiaxin Ding ◽

...

Keyword(s):

Focal Plane ◽

Inductively Coupled Plasma ◽

Dry Etching ◽

Focal Plane Arrays ◽

Type Ii ◽

Inductively Coupled ◽

Icp Dry Etching

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Antimony-Based Type-II Superlattice Photodetectors

10.21236/ada533220 ◽

2010 ◽

Author(s):

Shun L. Chuang ◽

Russell D. Dupuis

Keyword(s):

Type Ii ◽

Type Ii Superlattice

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Fabrication of 15-$\mu$ m Pitch $640\times512$ InAs/GaSb Type-II Superlattice Focal Plane Arrays

IEEE Journal of Quantum Electronics ◽

10.1109/jqe.2019.2919771 ◽

2019 ◽

Vol 55 (4) ◽

pp. 1-5 ◽

Cited By ~ 1

Author(s):

Fikri Oguz ◽

Yetkin Arslan ◽

Erkin Ulker ◽

Alpan Bek ◽

Ekmel Ozbay

Keyword(s):

Focal Plane ◽

Focal Plane Arrays ◽

Type Ii ◽

Type Ii Superlattice

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Optical and electrical performance of 5 µm InAs/GaSb Type-II superlattice for NOx sensing application

Materials Research Bulletin ◽

10.1016/j.materresbull.2021.111424 ◽

2021 ◽

pp. 111424

Author(s):

M Kesaria ◽

D Alshahrani ◽

D Kwan ◽

E Anyebe ◽

V Srivastava

Keyword(s):

Electrical Performance ◽

Type Ii ◽

Type Ii Superlattice ◽

Sensing Application

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Design and calculation of type-II superlattice resonant cavity-enhanced photodetector with high quantum efficiency and low dark current

Physica B Condensed Matter ◽

10.1016/j.physb.2021.413201 ◽

2021 ◽

pp. 413201

Author(s):

Ya-nan Du ◽

Lei Wang ◽

Yun Xu ◽

Guofeng Song

Keyword(s):

Quantum Efficiency ◽

Dark Current ◽

Resonant Cavity ◽

Type Ii ◽

High Quantum Efficiency ◽

High Quantum ◽

Type Ii Superlattice

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Investigation of anodic sulfidizaiton passivation of InAs/GaSb Type-II superlattice infrared detector

Optical and Quantum Electronics ◽

10.1007/s11082-021-03037-0 ◽

2021 ◽

Vol 53 (7) ◽

Author(s):

Junbin Li ◽

Xuchang Zhou ◽

Dongsheng Li ◽

Yingchun Mu ◽

Haipeng Wang ◽

...

Keyword(s):

Infrared Detector ◽

Type Ii ◽

Type Ii Superlattice

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Fabrication of a 1024 × 1024 format long wavelength infrared focal plane array based on type-II superlattice and barrier enhanced structure

Infrared Physics & Technology ◽

10.1016/j.infrared.2021.103700 ◽

2021 ◽

Vol 115 ◽

pp. 103700

Author(s):

Fangfang Wang ◽

Zhicheng Xu ◽

Zhizhong Bai ◽

Hui Li ◽

Yi Zhou ◽

...

Keyword(s):

Focal Plane ◽

Focal Plane Array ◽

Type Ii ◽

Infrared Focal Plane Array ◽

Long Wavelength ◽

Type Ii Superlattice ◽

Long Wavelength Infrared

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Type II superlattice detectors at SCD

Infrared Technology and Applications XLVII ◽

10.1117/12.2584601 ◽

2021 ◽

Author(s):

Philip C. Klipstein ◽

Yael Benny ◽

Yossi Cohen ◽

Nethanel Fraenkel ◽

Rami Fraenkel ◽

...

Keyword(s):

Type Ii ◽

Type Ii Superlattice

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The Pressure Dependent Band Offset in a Type II Superlattice, a Test for Band Line-Up Theories

Band Structure Engineering in Semiconductor Microstructures - NATO ASI Series ◽

10.1007/978-1-4757-0770-0_2 ◽

1989 ◽

pp. 7-20

Author(s):

L. M. Claessen

Keyword(s):

Band Offset ◽

Type Ii ◽

Type Ii Superlattice

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High operating temperature InAs/GaSb type-II superlattice detectors on GaAs substrate for the long wavelength infrared

Infrared Physics & Technology ◽

10.1016/j.infrared.2018.10.019 ◽

2019 ◽

Vol 96 ◽

pp. 141-144 ◽

Cited By ~ 7

Author(s):

R. Müller ◽

V. Gramich ◽

M. Wauro ◽

J. Niemasz ◽

L. Kirste ◽

...

Keyword(s):

Gaas Substrate ◽

Operating Temperature ◽

Type Ii ◽

Long Wavelength ◽

High Operating Temperature ◽

Type Ii Superlattice ◽

Long Wavelength Infrared

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