micro electrical mechanical system
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AIAA Journal ◽  
2006 ◽  
Vol 44 (10) ◽  
pp. 2224-2230 ◽  
Author(s):  
J. J. Miau ◽  
J. K. Tu ◽  
J. H. Chou ◽  
G. B. Lee

Author(s):  
S Thanagasundram ◽  
F S Schlindwein

The design and implementation of instrumentation to collect real-time vibrational data from a quasi-steady state machine (a dry vacuum pump) for fault prediction diagnostics is presented. When simultaneous multiple data collection points are required on the same machinery, the use of conventional transducers such as piezoelectric accelerometers becomes impractical due to their price, as each needs an expensive associated charge amplifier. The use of inexpensive micromachined integrated micro-electrical-mechanical system accelerometers such as ADXL105 has been explored here as an alternative to piezoelectric accelerometers for obtaining reliable and predictable data for diagnostics. Surface micromachined accelerometers are a new technology and their usage for vibrational analysis has been conservative due to concerns over increased noise levels and tolerance to high temperatures. In this article, it is shown that such concerns can be allayed. The time and frequency domain vibration signatures obtained using both types of accelerometers are compared. The study shows that ADXL105 accelerometers can be an effective alternative low-cost high-quality solution for machine condition monitoring.


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