Fine Grained Au Films with Controllable Mechanical Strength By Pulse
Plating for Micro-Electrical-Mechanical System Accelerometer
Keyword(s):
2019 ◽
Vol 21
◽
pp. 100281
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1992 ◽
Vol 50
(1)
◽
pp. 304-305
Keyword(s):
2005 ◽
Vol 118
(2)
◽
pp. 590
◽
2008 ◽
Vol 584-586
◽
pp. 610-616
Keyword(s):
2006 ◽
Vol 220
(8)
◽
pp. 1135-1146
◽
1992 ◽
Vol 50
(2)
◽
pp. 1052-1053
Keyword(s):