scholarly journals The study of capacitively-coupled hydrogen plasma at very high frequency

2012 ◽  
Vol 61 (16) ◽  
pp. 165203
Author(s):  
Li Yan-Yang ◽  
Yang Shi-E ◽  
Chen Yong-Sheng ◽  
Zhou Jian-Peng ◽  
Li Xin-Li ◽  
...  
Keyword(s):  
High Frequency ◽  
Hydrogen Plasma ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Very High

Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4Plasmas

2003 ◽  
Vol 42 (Part 2, No. 12B) ◽  
pp. L1532-L1534 ◽  
Author(s):  
Takayuki Ohta ◽  
Masaru Hori ◽  
Tetsuro Ishida ◽  
Toshio Goto ◽  
Masafumi Ito ◽  
...  
Keyword(s):  
High Frequency ◽  
Driving Frequency ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Translational Temperature ◽  
Absolute Density ◽  
Very High

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

2013 ◽  
Vol 52 (11S) ◽  
pp. 11ND01 ◽  
Author(s):  
Kohei Ogiwara ◽  
Weiting Chen ◽  
Kiichiro Uchino ◽  
Yoshinobu Kawai
Keyword(s):  
High Frequency ◽  
Hydrogen Plasma ◽  
Very High Frequency ◽  
Feeding Method ◽  
Very High
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