Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor

2018 ◽  
Vol 123 (22) ◽  
pp. 223304 ◽  
Author(s):  
Dao-Man Han ◽  
Yong-Xin Liu ◽  
Fei Gao ◽  
Xiang-Yu Wang ◽  
Ang Li ◽  
...  
Keyword(s):  
Fiber Bragg Grating ◽  
Standing Wave ◽  
High Frequency ◽  
Large Area ◽  
Very High Frequency ◽  
Wave Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas ◽  
Bragg Grating Sensor ◽  
Very High

Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4Plasmas

2003 ◽  
Vol 42 (Part 2, No. 12B) ◽  
pp. L1532-L1534 ◽  
Author(s):  
Takayuki Ohta ◽  
Masaru Hori ◽  
Tetsuro Ishida ◽  
Toshio Goto ◽  
Masafumi Ito ◽  
...  
Keyword(s):  
High Frequency ◽  
Driving Frequency ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Translational Temperature ◽  
Absolute Density ◽  
Very High
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