Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

2010 ◽  
Vol 107 (5) ◽  
pp. 053302 ◽  
Author(s):  
Kallol Bera ◽  
Shahid Rauf ◽  
Jason Kenney ◽  
Leonid Dorf ◽  
Ken Collins
Keyword(s):  
Magnetic Field ◽  
High Frequency ◽  
Inhomogeneous Magnetic Field ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Coupled Plasmas ◽  
Very High

Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4Plasmas

2003 ◽  
Vol 42 (Part 2, No. 12B) ◽  
pp. L1532-L1534 ◽  
Author(s):  
Takayuki Ohta ◽  
Masaru Hori ◽  
Tetsuro Ishida ◽  
Toshio Goto ◽  
Masafumi Ito ◽  
...  
Keyword(s):  
High Frequency ◽  
Driving Frequency ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Translational Temperature ◽  
Absolute Density ◽  
Very High
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