3D Glass and Silicon Interposers with TPV vs. 3D ICs with TSV

2012 ◽  
Vol 2012 (DPC) ◽  
pp. 000757-000790 ◽  
Author(s):  
Rao Tummala

3D Packaging has been emerging as the dominant theme for more than a decade. It started as package on package stacking in the 1970s for memory devices. More recently, it moved to stacked, wire bonded chips as well as miniaturized package-on-package (POP). Stacking with flip chip soon followed. In all these cases, ICs are fabricated in wafer fabs and packaging of these ICs was subsequently performed independently. The next natural evolution to be expected is to eliminate external interconnections outside the ICs by means of through vias, now called TSVs. But this became revolutionary, complex and costly. It impacted wafer fabrication by virtue of having to co-process transistors, BEOL wiring and TSV interconnections, all in the wafer fab. This is referred to as 3D ICs with TSV. The benefits of 3D ICs are overwhelming. They include highest performance in smallest size by virtue of stacking many ultra-thin ICs and interconnecting them with through-silicon-vias. But such a technology is also complex and costly to manufacture. It presents many other problems that include thermal management, testability, and extendibility. Georgia Tech PRC proposes to demonstrate lower cost and simpler 3D Interposers with TPVs to address most of the above challenges. In this scenario, through-package-vias (TPV) are fabricated in the ultra-thin and low-cost silicon or glass interposers at the same I/O density or pitch as in TSVs in the logic ICs but without the need for TSVs in the logic ICs. Such a concept is 3-dimensional; allowing stacking of ICs on both sides of the interposer with the same I/O pitch as TSVs and yet minimizes the thermal, testability and extendibility problems. This paper presents the status, progress and remaining challenges of 3D Interposer concept at Georgia Tech involving more than 25 companies in a global consortium.

2010 ◽  
Vol 2010 (1) ◽  
pp. 000548-000553
Author(s):  
Zhaozhi Li ◽  
Brian J. Lewis ◽  
Paul N. Houston ◽  
Daniel F. Baldwin ◽  
Eugene A. Stout ◽  
...  

Three Dimensional (3D) Packaging has become an industry obsession as the market demand continues to grow toward higher packaging densities and smaller form factor. In the meanwhile, the 3D die-to-wafer (D2W) packaging structure is gaining popularity due to its high manufacturing throughput and low cost per package. In this paper, the development of the assembly process for a 3D die-to-wafer packaging technology, that leverages the wafer level assembly technique and flip chip process, is introduced. Research efforts were focused on the high-density flip chip wafer level assembly techniques, as well as the challenges, innovations and solutions associated with this type of 3D packaging technology. Processing challenges and innovations addressed include flip chip fluxing methods for very fine-pitch and small bump sizes; wafer level flip chip assembly program creation and yield improvements; and set up of the Pb-free reflow profile for the assembled wafer. 100% yield was achieved on the test vehicle wafer that has totally 1,876 flip chip dies assembled on it. This work has demonstrated that the flip chip 3D die-to-wafer packaging architecture can be processed with robust yield and high manufacturing throughput, and thus to be a cost effective, rapid time to market alternative to emerging 3D wafer level integration methodologies.


2014 ◽  
Vol 783-786 ◽  
pp. 2758-2764
Author(s):  
Chang Woo Lee ◽  
Young Ki Ko ◽  
Yong Ho Ko ◽  
Jung Hwan Bang

The development of 3D integration is necessarily required for high speed, high density, small size, and multi-functional electronic devices. Through silicon via (TSV) technology has been rapidly developed to fulfill the demand of the next generation of multifunctional electronic systems as one of the most alternative applications for 3D packaging. In this study, low cost and high speed molten solder-filling of TSV and bonding process by using micro bump was investigated. Micro bumps were formed with two step, Cu pillar bump and Sn-Ag cap bump by using electroplating. The size of micro-bumps was 10 and 20um and the precise content of the bump was developed with good planarity by adding reflow process. Additionally, the SiC nanoparticle composite solder was fabricated for low CTE filling material. From the results, it is possible that the CTE of composite solder added 1.0wt% SiC nanoparticles had decreased until 15.0ppm/°C. Comparing CTE of pure Sn, which was about 24.0ppm/°C, it was very low CTE and lower then CTE of Cu (16.5ppm/°C). Even if the electrical resistance of nanopowder composite solder is increased, the increasing rate is very slow until 1.0 wt%. However, the resistance changing rate is rapidly increased over the 1.0wt%. From the result, it is expected that nanopowder composite solder can contribute high reliability of molten solder filling TSV.


MRS Advances ◽  
2020 ◽  
Vol 5 (37-38) ◽  
pp. 1929-1935
Author(s):  
Kimberly Beers ◽  
Andrew E. Hollowell ◽  
G. Bahar Basim

AbstractCopper is a commonly used interconnect metal in microelectronic interconnects due to its exceptional electrical and thermal properties. Particularly in applications of the 2.5 and 3D integration, Cu is utilized in through-silicon-vias (TSVs) and flip chip interconnects between microelectronic chips for providing miniaturization, lower power and higher performance than current 2D packaging approaches. SnAg capped Cu pillars are a common high-density interconnect technology for flip chip bonding. For these interconnects, specific properties of the Cu surface, such as roughness and cleanliness, are an important factor in the process to ensure quality solder bumps. During electroplating, tight processing parameters must be met so that defects are avoided, and high bump uniformity is achieved. An understanding of the interactions at the solder and Cu pillar interface is needed, based on the electroplating parameters, to determine the best method for populating solder on the wafer surface. In this study, surface treatment techniques such as oxygen plasma cleaning were performed on the Cu surfaces and the SnAg plating chemistry for depositing the solder were evaluated through hull cell testing to qualitatively determine the range of current densities to investigate. It was observed that current density while plating played a large role in solder bump deposition morphology. At the higher current densities greater than 60 mA/cm2, bump height non-uniformity and dendritic growth are observed and at lower current densities, less than or equal to 60 mA/cm2, uniform, continuous bump height occurred.


Author(s):  
Lewis(In Soo) Kang

The market of Connectivity, Internet of Things (IoT), Wearable and Smart industrial applications leads Fan Out Wafer Level Package (FOWLP) technologies to a promising solution to overcome the limitation of conventional wafer level package, flip chip package and wire bonding package in terms of the solution of low cost, high performance and smaller form factor packaging. Moreover, FOWLP technology can be extended to system-in-package (SiP) area, such as multi chip 2D package and 3D stack package types. nepes Corporation has developed several advanced package platforms such as single, multi dies and 2D, 3D packaging by using FOWLP and embedding technologies. To fulfill SiP (system-in-package) with FOWLP, several dies and components have been embedded into one package which offers 40~90 % of volumetric shrink compared to the current module system with the flexibility of product design for end users. 3D package technology of PoP (Package on Package) structure will be introduced for communication module and system control application.


2014 ◽  
Vol 2014 (1) ◽  
pp. 000165-000169
Author(s):  
Mary Liu ◽  
Wusheng Yin

3D packaging has recently become very attractive because it can provide more flexibility in device design and supply chain, reduce the gap between silicon die and organic substrate, help miniaturize devices and meet the demand of high speed, provide more memory, more function and low cost. With the advancement of 3D packaging, the bump height is now down from 80μ to 10μ. When the bump diameter is 20–40μ and height 10μ, the process and reliability are obvious issues. It is well known that underfill can enhance the reliability for regular flip chip, however underfill won't help assembly process. In order to resolve some difficulties that 3D packaging faces, YINCAE Advanced Materials, LLC has developed solderable anisotropic conductive adhesives for 3D package applications. In this paper we will discuss the assembly process and reliability in detail.


2010 ◽  
Vol 2010 (1) ◽  
pp. 000098-000104
Author(s):  
Edmar M. Amaya ◽  
Gene A. Lang

Anisotropic Conductive Technologies (ACT), and materials comprising films and epoxies, started as a solution to provide low-cost reliable interconnection for glass displays on small, cheap calculators. ACT is mature now and have encroached into other types of technologies, especially Flip Chip, LEDs, OELDS, MEMS, 3D packaging, Microwave/RF and Optics. In today's assembly lines, ACT have replaced gold bumps, solder balls, wire bonds, and created new, more cost efficient chip-on chip, chip-on-film, chip-on-board, and chip-on-ceramic applications. Companies around the globe have realized the advantages of this technology to control thermal management, failures, speed of production, and they have vigorously engaged in protection of their intellectual property. The author will present a survey of the technology from a patent, trade secret, and licensing approach. In his analyses of the findings, he will show how different companies around the globe are using ACT to solve their interconnection needs. The author will also present future types of ACT and its uses for military, aerospace, and other commercial applications.


2010 ◽  
Vol 7 (3) ◽  
pp. 146-151 ◽  
Author(s):  
Zhaozhi Li ◽  
Sangil Lee ◽  
Brian J. Lewis ◽  
Paul N. Houston ◽  
Daniel F. Baldwin ◽  
...  

The industry has witnessed the adoption of the flip chip for its low cost, small form factor, high performance, and great I/O flexibility. As three-dimensional (3D) packaging technology moves to the forefront, the flip chip to wafer integration, which is also a silicon-to-silicon assembly, is gaining more and more popularity. No flow underfill is of special interest for the wafer level flip chip assembly, as it can dramatically reduce the process time and the cost per package, due to the reduction in the number of process steps as well as the dispenser and cure oven that would otherwise be necessary for the standard capillary underfill process. This paper introduces the development of a no flow underfill process for a sub-100 micron pitch flip chip to CSP wafer level assembly. Challenges addressed include the no flow underfill reflow profile study, underfill dispense amount study, chip floating control, underfill voiding reduction, and yield improvement. Also, different no flow underfill candidates were investigated to determine the best performing processing material.


2019 ◽  
Vol 25 (11) ◽  
pp. 1249-1264 ◽  
Author(s):  
Amoljit Singh Gill ◽  
Parneet Kaur Deol ◽  
Indu Pal Kaur

Background: Solid free forming (SFF) technique also called additive manufacturing process is immensely popular for biofabrication owing to its high accuracy, precision and reproducibility. Method: SFF techniques like stereolithography, selective laser sintering, fused deposition modeling, extrusion printing, and inkjet printing create three dimension (3D) structures by layer by layer processing of the material. To achieve desirable results, selection of the appropriate technique is an important aspect and it is based on the nature of biomaterial or bioink to be processed. Result & Conclusion: Alginate is a commonly employed bioink in biofabrication process, attributable to its nontoxic, biodegradable and biocompatible nature; low cost; and tendency to form hydrogel under mild conditions. Furthermore, control on its rheological properties like viscosity and shear thinning, makes this natural anionic polymer an appropriate candidate for many of the SFF techniques. It is endeavoured in the present review to highlight the status of alginate as bioink in various SFF techniques.


Author(s):  
Murat Fidan ◽  
Alper Bayrak ◽  
Umid Karli

In this study, a low-cost and adaptable isometric strength measurement and exercise development system are described. The implemented system consists of mechanical structure, force measurement sensor, electronic circuit, and computer software. Isometric-isotonic (via spring resistance) strength analysis and various exercise programs can be applied with the system. The developed system has a lower cost compared to its counterparts in the literature and has a structure that can be adapted to different machines and measuring methods. The operability and reliability of the isometric strength measurement and exercise development system have been proven by calibration tests.


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