scholarly journals Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Sensors ◽  
2020 ◽  
Vol 20 (12) ◽  
pp. 3483
Author(s):  
Marco Baù ◽  
Marco Ferrari ◽  
Habiba Begum ◽  
Abid Ali ◽  
Joshua E.-Y. Lee ◽  
...  
Keyword(s):  
Electronic Circuit ◽  
Spiral Coil ◽  
Sensor Unit ◽  
First Order ◽  
High Impedance ◽  
Mems Resonator ◽  
Load Sensor ◽  
Micro Electromechanical System ◽  
Contour Mode ◽  
Periodic Switching

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode at about 6.3 MHz. The MEMS resonator is operated in one-port configuration and it is connected to a spiral coil, forming the sensor unit. A proximate electronic interrogation unit is electromagnetically coupled through a readout coil to the sensor unit. The proposed technique exploits interleaved excitation and detection phases of the MEMS resonator. A tailored electronic circuit manages the periodic switching between the excitation phase, where it generates the excitation signal driving the readout coil, and the detection phase, where it senses the transient decaying response of the resonator by measuring through a high-impedance amplifier the voltage induced back across the readout coil. This approach advantageously ensures that the readout frequency of the MEMS resonator is first order independent of the interrogation distance between the readout and sensor coils. The reported experimental results show successful contactless readout of the MEMS resonator independently from the interrogation distance over a range of 12 mm, and the application as a resonant sensor for ambient temperature and as a resonant acoustic-load sensor to detect and track the deposition and evaporation processes of water microdroplets on the MEMS resonator surface.

scholarly journals Electronic Circuit Emuling a First-order Time-delay Differential Equation

2021 ◽  
Vol 19 (1 Jan-Jun) ◽  
Author(s):  
César Jiménez ◽  
I. Campos-Canton ◽  
L. J. Ontañón-García
Keyword(s):  
Differential Equation ◽  
Time Delay ◽  
Phase Shift ◽  
Electronic Circuit ◽  
Linear Time ◽  
Electrical Circuit ◽  
First Order ◽  
Simulation Results ◽  
Delay Differential ◽  
Theoretical Results

This article provides undergraduates a useful tool for a better understanding of the time delay eect on a electronic circuit. The time delay eect is analyzed on this paper in a rst order dierential equation. This linear time delay is associated with the amplitude of a first-order dierential equation and is responsible of three responses: one of the responses is an dierential equation type in first-order without delay, another one of the responses is a dierential equation type in second-order and nally we have the response of a harmonic oscillator.The proposed circuit is an emulator that develop the three different responses mentioned above. Simulink-Matlab software was used to implement the time delay and simulate the dierential equation. This simulation results coincide with the theoretical results. In the same manner, the experimental results match those of the theory. The electronical circuits suggested consist of three blocks: an integrator block, a phase shift block and a gain block. The electrical circuit is composed of resistors, capacitors and operational ampliers.

Voltage Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonator Cantilevers Using the Method of Multiple Scales

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Differential Equation ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Zero Order ◽  
Voltage Response ◽  
Order Problem ◽  
Superharmonic Resonance ◽  
First Order ◽  
Mems Resonator

This work investigates the voltage response of superharmonic resonance of second order of electrostatically actuated Micro-Electro-Mechanical Systems (MEMS) resonator cantilevers. The results of this work can be used for mass sensors design. The MEMS device consists of MEMS resonator cantilever over a parallel ground plate (electrode) under Alternating Current (AC) voltage. The AC voltage is of frequency near one fourth of the natural frequency of the resonator which leads to the superharmonic resonance of second order. The AC voltage produces an electrostatic force in the category of hard excitations, i.e. for small voltages the resonance is not present while for large voltages resonance occurs and bifurcation points are born. The forces acting on the resonator are electrostatic and damping. The damping force is assumed linear. The Casimir effect and van der Waals effect are negligible for a gap, i.e. the distance between the undeformed resonator and the ground plate, greater than one micrometer and 50 nanometers, respectively, which is the case in this research. The dimensional equation of motion is nondimensionalized by choosing the gap as reference length for deflections, the length of the resonator for the axial coordinate, and reference time based on the characteristics of the structure. The resulting dimensionless equation includes dimensionless parameters (coefficients) such as voltage parameter and damping parameter very important in characterizing the voltage-amplitude response of the structure. The Method of Multiple Scales (MMS) is used to find a solution of the differential equation of motion. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. In this work, since the structure is under hard excitations the electrostatic force must be in the zero-order problem. The assumption made in this investigation is that the dimensionless amplitudes are under 0.4 of the gap, and therefore all the terms in the Taylor expansion of the electrostatic force proportional to the deflection or its powers are small enough to be in the first-order problem. This way the zero-order problem solution includes the mode of vibration of the structure, i.e. natural frequency and mode shape, resulting from the homogeneous differential equation, as well as particular solutions due to the nonhomogeneous terms. This solution is then used in the first-order problem to find the voltage-amplitude response of the structure. The influences of frequency and damping on the response are investigated. This work opens the door of using smaller AC frequencies for MEMS resonator sensors.

Complex Logic Operations Based on MEMS Resonators

2018 ◽  
Author(s):  
Nouha Alcheikh ◽  
Sherif A. Tella ◽  
Mohammad I. Younis
Keyword(s):  
Logic Operation ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Resonant Beam ◽  
Half Adder ◽  
Multiple Input ◽  
Logic Operations ◽  
Logic Functions ◽  
Micro Electromechanical System ◽  
Significant Attention

Complex logic functions based on micro electromechanical resonators has recently attracted significant attention. Realization of complex logic functions through cascading micro resonators has been deterred by challenges involved in their interconnections and the large required array of resonators. This paper presents a micro electromechanical system MEMS resonator with multiple input (actuation) and output (detection) that enables the realization of complex logic operations. The devices are based on a compound resonator consisting of an in-plane clamped-guided arch beam that is mechanically coupled from its guided side to two flexure beams and to another T-shaped resonant beam. As examples, we experimentally demonstrate using the device to realize a half adder and a 1:2 DEMUX, based on electrothermal and electrostatic tuning of the arch beam and side resonant beam. The logic operation is based on the linear frequency modulation. This paper demonstrates that with such compound MEMS resonators, it is possible to build more complex logic functionalities.

One port contour-mode ZnO piezoelectric MEMS resonator

2011 ◽  
Vol 88 (9) ◽  
pp. 3003-3010 ◽  
Author(s):  
Tadeusz Gryba ◽  
Julien Carlier ◽  
Shengxiang Wang ◽  
XingZhong Zhao ◽  
Shishang Guo ◽  
...  
Keyword(s):  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Contour Mode

Dual systems for all: Higher-order, role-based relational reasoning as a uniquely derived feature of human cognition

2019 ◽  
Vol 42 ◽  
Author(s):  
Daniel J. Povinelli ◽  
Gabrielle C. Glorioso ◽  
Shannon L. Kuznar ◽  
Mateja Pavlic
Keyword(s):  
Temporal Reasoning ◽  
Higher Order ◽  
Important Case ◽  
Human Cognition ◽  
Relational Reasoning ◽  
Dual Systems ◽  
First Order ◽  
Reasoning System ◽  
Role Based

Abstract Hoerl and McCormack demonstrate that although animals possess a sophisticated temporal updating system, there is no evidence that they also possess a temporal reasoning system. This important case study is directly related to the broader claim that although animals are manifestly capable of first-order (perceptually-based) relational reasoning, they lack the capacity for higher-order, role-based relational reasoning. We argue this distinction applies to all domains of cognition.

Stochasting modeling of planetary ring systems

1984 ◽  
Vol 75 ◽  
pp. 461-469 ◽  
Author(s):  
Robert W. Hart
Keyword(s):  
Maximum Entropy ◽  
Ring System ◽  
The Sun ◽  
Ultimate State ◽  
Interparticle Interactions ◽  
Ring Systems ◽  
First Order ◽  
Planetary Ring ◽  
Insight Into

ABSTRACTThis paper models maximum entropy configurations of idealized gravitational ring systems. Such configurations are of interest because systems generally evolve toward an ultimate state of maximum randomness. For simplicity, attention is confined to ultimate states for which interparticle interactions are no longer of first order importance. The planets, in their orbits about the sun, are one example of such a ring system. The extent to which the present approximation yields insight into ring systems such as Saturn's is explored briefly.

Sign in / Sign up

Export Citation Format

Share Document