Voltage Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonator Cantilevers Using the Method of Multiple Scales

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Differential Equation ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Zero Order ◽  
Voltage Response ◽  
Order Problem ◽  
Superharmonic Resonance ◽  
First Order ◽  
Mems Resonator

This work investigates the voltage response of superharmonic resonance of second order of electrostatically actuated Micro-Electro-Mechanical Systems (MEMS) resonator cantilevers. The results of this work can be used for mass sensors design. The MEMS device consists of MEMS resonator cantilever over a parallel ground plate (electrode) under Alternating Current (AC) voltage. The AC voltage is of frequency near one fourth of the natural frequency of the resonator which leads to the superharmonic resonance of second order. The AC voltage produces an electrostatic force in the category of hard excitations, i.e. for small voltages the resonance is not present while for large voltages resonance occurs and bifurcation points are born. The forces acting on the resonator are electrostatic and damping. The damping force is assumed linear. The Casimir effect and van der Waals effect are negligible for a gap, i.e. the distance between the undeformed resonator and the ground plate, greater than one micrometer and 50 nanometers, respectively, which is the case in this research. The dimensional equation of motion is nondimensionalized by choosing the gap as reference length for deflections, the length of the resonator for the axial coordinate, and reference time based on the characteristics of the structure. The resulting dimensionless equation includes dimensionless parameters (coefficients) such as voltage parameter and damping parameter very important in characterizing the voltage-amplitude response of the structure. The Method of Multiple Scales (MMS) is used to find a solution of the differential equation of motion. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. In this work, since the structure is under hard excitations the electrostatic force must be in the zero-order problem. The assumption made in this investigation is that the dimensionless amplitudes are under 0.4 of the gap, and therefore all the terms in the Taylor expansion of the electrostatic force proportional to the deflection or its powers are small enough to be in the first-order problem. This way the zero-order problem solution includes the mode of vibration of the structure, i.e. natural frequency and mode shape, resulting from the homogeneous differential equation, as well as particular solutions due to the nonhomogeneous terms. This solution is then used in the first-order problem to find the voltage-amplitude response of the structure. The influences of frequency and damping on the response are investigated. This work opens the door of using smaller AC frequencies for MEMS resonator sensors.

Frequency Response of Electrostatically Actuated MEMS Resonators Under Superharmonic Resonance Using MMS

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Second Order ◽  
Voltage Response ◽  
Order Problem ◽  
Plate Electrode ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator

This work investigates the voltage response of superharmonic resonance of second order of electrostatically actuated Micro-Electro-Mechanical Systems (MEMS) resonator cantilevers. The results of this work can be used for mass sensors design. The MEMS device consists of MEMS resonator cantilever over a parallel ground plate (electrode) under Alternating Current (AC) voltage. The AC voltage is of frequency near one fourth of the natural frequency of the resonator which leads to the superharmonic resonance of second order. The AC voltage produces an electrostatic force in the category of hard excitations, i.e. for small voltages the resonance is not present while for large voltages resonance occurs and bifurcation points are born. This solution is then used in the first-order problem to find the voltage-amplitude response of the structure. The influences of frequency and damping on the response are investigated. This work opens the door of using smaller AC frequencies for MEMS resonator sensors. The frequency response of the superharmonic resonance of the structure is investigated using the method of multiple scales (MMS).

Casimir Effect on Voltage Response of Superharmonic Resonance of NEMS Resonators

2017 ◽  
Author(s):  
Martin Botello ◽  
Christian Reyes ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Multiple Scales ◽  
Nonlinear Partial Differential Equation ◽  
Equation Of Motion ◽  
Second Order ◽  
Mode Shapes ◽  
Voltage Response ◽  
Casimir Forces ◽  
Superharmonic Resonance ◽  
Reference Length

This paper investigates the voltage response of superharmonic resonance of the second order of electrostatically actuated nano-electro-mechanical system (NEMS) resonator sensor. The structure of the NEMS device is a resonator cantilever over a ground plate under Alternating Current (AC) voltage. Superharmonic resonance of second order occurs when the AC voltage is operating in a frequency near-quarter the natural frequency of the resonator. The forces acting on the system are electrostatic, damping and Casimir. To induce a bifurcation phenomenon in superharmonic resonance, the AC voltage is in the category of hard excitation. The gap distance between the cantilever resonator and base plate is in the range of 20 nm to 1 μm for Casimir forces to be present. The differential equation of motion is converted to dimensionless by choosing the gap as reference length for deflections, the length of the resonator for the axial coordinate, and reference time based on the characteristics of the structure. The Method of Multiple Scales (MMS) and Reduced Order Model (ROM) are used to model the characteristic of the system. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. ROM, based on the Galerkin procedure, uses the undamped linear mode shapes of the undamped cantilever beam as the basis functions. The influences of parameters (i.e. Casimir, damping, fringe, and detuning parameter) were also investigated.

Casimir Effect on Frequency Response of Superharmonic Resonance of NEMS Resonators

2017 ◽  
Author(s):  
Martin Botello ◽  
Christian Reyes ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Frequency Response ◽  
Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Nonlinear Partial Differential Equation ◽  
Equation Of Motion ◽  
Casimir Forces ◽  
Superharmonic Resonance ◽  
Reference Length

This paper investigates the frequency response of superharmonic resonance of the second order of electrostatically actuated nano-electro-mechanical system (NEMS) resonator sensor. The structure of the MEMS device is a resonator cantilever over a ground plate under Alternating Current (AC) voltage. Superharmonic resonance insinuates that the AC voltage is operating in a frequency near one-fourth the natural frequency of the resonator. The forces acting on the system are electrostatic, damping and Casimir force. For the electrostatic force, the AC voltage is in the category of hard excitation in order to induce a bifurcation phenomenon. For Casimir forces to affect the system, the gap distance between the cantilever resonator and base plate is in the range of 20 nm to 1 μm. The differential equation of motion is converted to dimensionless by choosing the gap as reference length for deflections, the length of the resonator for the axial coordinate, and reference time based on the characteristics of the structure. The Method of Multiple Scales (MMS) is used to model the characteristic of the system. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. The influences of parameters (i.e. Casimir, damping, second voltage and fringe) were also investigated.

Frequency Response for MEMS Circular Plate Resonators Under Superharmonic Resonance of the Second Order

2018 ◽  
Author(s):  
Martin Botello ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Circular Plate ◽  
Software Package ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Micro Electro Mechanical System ◽  
Second Order ◽  
Mode Shapes ◽  
Amplitude Response ◽  
Superharmonic Resonance ◽  
Mems Resonator

A nonlinear dynamics investigation is conducted on the frequency-amplitude response of electrostatically actuated micro-electro-mechanical system (MEMS) clamped plate resonators. The Alternating Current (AC) voltage is operating in the realm of superharmonic resonance of second order. This is given by an AC frequency near one-fourth of the natural frequency of the resonator. The magnitude of the AC voltage is large enough to be considered as hard excitation. The external forces acting on the MEMS resonator are viscous air damping and electrostatic force. Two proven mathematical models are utilized to obtain a predicted frequency-amplitude response for the MEMS resonator. Method of Multiple Scales (MMS) allows the transformation of a partial differential equation of motion into zero-order and first-order problems. Hence, MMS can be directly applied to obtain the frequency-amplitude response. Reduced Order Model (ROM), based on the Galerkin procedure, uses mode shapes of vibration for undamped circular plate resonator as a basis of functions. ROM is numerically integrated using MATLAB software package to obtain time responses. Also, ROM is used to conduct a continuation and bifurcation analysis utilizing AUTO 07P software package in order to obtain the frequency-amplitude response. The time responses show the movement of the center of the MEMS circular plate as a function of time. The frequency-amplitude response allows one to observe bifurcation and pull-in instabilities within the nonlinear system over a range of frequencies. The influences of parameters (i.e. damping and voltage) are also included in this investigation.

Boundary Value Problem Method to Investigate Superharmonic Resonance of MEMS Resonators

2017 ◽  
Author(s):  
Julio Beatriz ◽  
Martin Botello ◽  
Christian Reyes ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Equation Of Motion ◽  
The Other ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Amplitude Frequency Response ◽  
Problem Method ◽  
Mems Resonators

This paper deals with two different methods to analyze the amplitude frequency response of an electrostatically actuated micro resonator. The methods used in this paper are the method of multiple scales, which is an analytical method with one mode of vibration. The other method is based on system of odes which is derived using the partial differential equation of motion, as well as the boundary conditions. This system is then solved using a built in matlab function known as BVP4C. Results are then shown comparing the two methods, under a variety of parameters, including the influence of damping, voltage, and fringe.

Casimir Effect on Superharmonic Resonance of Bio-NEMS Circular Plate Resonator Sensors

2018 ◽  
Author(s):  
Martin Botello ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Partial Differential Equation ◽  
Circular Plate ◽  
Casimir Effect ◽  
Nonlinear Partial Differential Equation ◽  
Equation Of Motion ◽  
Amplitude Response ◽  
Partial Differential ◽  
Superharmonic Resonance ◽  
Mems Resonator

Casimir effect on superharmonic resonance of electrostatically actuated bio-nano-electro-mechanical system (Bio-NEMS) circular plate resonator sensor is investigated. The plate sensor resonator is clamped at the outer end and suspended over a parallel ground plate. The sensor can be used for detecting human viruses. Superharmonic resonance of the second order, frequency near one-fourth the natural frequency of the resonator, is induced using Alternating Current (AC) voltage. The magnitude of the AC voltage is also large enough to be consider hard excitation acting on the resonator. Beside Casimir effect, other external forces (i.e. electrostatic force and viscous air damping) acting on the MEMS resonator create a nonlinear behaviors such as bifurcation and pull-in instability. Hence, numerical models, such as Method of Multiple Scales (MMS) and Reduced Order Model (ROM), are used to predict the frequency-amplitude response for MEMS resonator. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. While, ROM, based on the Galerkin procedure which uses the mode shapes of vibration of the resonator as a basis of functions, transforms the nonlinear partial differential equation of motion into a system of ordinary differential equation with respect to dimensionless time. The frequency-amplitude response allows one to observe the behavior of the system for a range of frequencies near the superharmonic resonance. The effects of parameters such as Casimir effect, voltage, and damping on the frequency-amplitude response are reported.

Closed-Form Solutions of Axisymmetrical Transverse Vibrations of Concave Parabolic Thickness Annular Plates

2009 ◽  
Author(s):  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Natural Frequencies ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Equation Of Motion ◽  
Mode Shapes ◽  
Partial Differential ◽  
First Order ◽  
Annular Plates ◽  
Transverse Vibrations

This paper deals with transverse vibrations of axisymmetrical annular plates of concave parabolic thickness. A closed-form solution of the partial differential equation of motion is reported. An approach in which both method of multiple scales and method of factorization have been employed is presented. The method of multiple scales is used to reduce the partial differential equation of motion to two simpler partial differential equations that can be analytically solved. The solutions of the two differential equations are two levels of approximation of the exact solution of the problem. Using the factorization method for solving the first differential equation, which is homogeneous and includes a fourth-order spatial-dependent operator and second-order time-dependent operator, the general solution is obtained in terms of hypergeometric functions. The first diferential equation and the second differential equation (nonhomogeneous) along with the given boundary conditions give so-called zero-order and first-order approximations, respectively, of the natural frequencies and mode shapes. Any boundary conditions could be considered. The influence of Poisson’s ratio on the natural frequencies and mode shapes could be further studied using the first-order approximations reported here. This approach can be extended to nonlinear, and/or forced vibrations.

Voltage Response of Circular Plate MEMS Resonators Under Superharmonic Resonance

2018 ◽  
Author(s):  
Martin Botello ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Partial Differential Equation ◽  
Circular Plate ◽  
Equation Of Motion ◽  
Mode Shapes ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Amplitude Response ◽  
Partial Differential ◽  
Superharmonic Resonance

The superharmonic resonance of second order of microelectro-mechanical system (MEMS) circular plate resonator under electrostatic actuation is investigated. The MEMS resonator consists of a clamped circular plate suspended over a parallel ground plate under an applied Alternating Current (AC) voltage. The AC voltage is characterized as hard excitation, i.e. the magnitude is large enough, and the operating frequency is near one-fourth of the natural frequency of the resonator. Reduced Order Model (ROM), based on the Galerkin procedure, transforms the partial differential equation of motion into a system of ordinary differential equations in time using mode shapes of vibration of the circular plate resonator. Three numerical methods are used to predict the voltage-amplitude response of the MEMS plate resonator. First, the Method of Multiple Scales (MMS) is directly applied to the partial differential equation of motion which is this way transformed into zero-order and first-order problems. Second, ROM using two modes of vibration is numerical integrated using MATLAB to predict time responses, and third, the AUTO 07P software for continuation and bifurcation to predict the voltage-amplitude response. The nonlinear behavior (i.e. bifurcation and pull-in instability) of the system is attributed to the inclusion of viscous air damping and electrostatic force in the model. The influences of various parameters (i.e. detuning frequency and damping) are also investigated in this work.

ROM of Superharmonic Resonance of Second Order of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Second Order ◽  
Voltage Response ◽  
Order Model ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Method Effects ◽  
Ground Plate

This paper deals with the voltage-amplitude response (or voltage response) of superharmonic resonance of second order of MEMS resonator sensors under electrostatic actuation. The system consists of a MEMS flexible cantilever above a parallel ground plate. The AC frequency of actuation is near one fourth the natural frequency. The voltage response of the superharmonic resonance of second order of the structure is investigated using the Reduced Order Model (ROM) method. Effects of voltage and damping voltage response are reported.

Amplitude-Frequency Response for Superharmonic Resonance of Fourth Order of Electrostatically Actuated MEMS Cantilever Resonators

2019 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christopher Reyes
Keyword(s):  
Frequency Response ◽  
Fourth Order ◽  
Microelectromechanical Systems ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Damping Force ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Homotopy Analysis ◽  
Ground Plate

Abstract This paper deals with the frequency response of superharmonic resonance of order four of electrostatically actuated MicroElectroMechanical Systems (MEMS) cantilever resonators. The MEMS structure in this work consists of a microcantilever parallel to an electrode ground plate. The MEMS resonator is elelctrostatically actuated through an AC voltage between the cantilever and the ground plate. The voltage is in the category of hard excitation. The AC frequency is near one eight of the natural frequency of the resonator. Since the electrostatic force acting on the resonator is proportional to the square of the voltage, it leads to superharmonic resonance of fourth order. Besides the electrostatic force, the system experiences damping. The damping force in this work is proportional to the velocity of the resonator, i.e. it is linear damping. Three methods are employed in this investigation. First, the Method of Multiple Scales (MMS), a perturbation method, is used predictions of the resonant regions for weak nonlinearities and small to moderate amplitudes. Second, the Homotopy Analysis Method (HAM), and third, the Reduced Order Model (ROM) method using two modes of vibration are also utilized to investigate the resonance. ROM is solved through numerical integration using Matlab in order to simulate time responses of the structure. All methods are in agreement for moderate nonlinearities and small to moderate amplitudes. This work shows that adequate MMS and HAM provide good predictions of the resonance.

Sign in / Sign up

Export Citation Format

Share Document