High-impedance Buffer Amplifier For Micro-electromechanical System (MEMS) Resonator Measurements

2010 ◽  
Author(s):  
Brianna Murphy ◽  
Roger Kaul
Keyword(s):  
Electromechanical System ◽  
High Impedance ◽  
Mems Resonator ◽  
Buffer Amplifier ◽  
Micro Electromechanical System

scholarly journals Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Sensors ◽  
2020 ◽  
Vol 20 (12) ◽  
pp. 3483
Author(s):  
Marco Baù ◽  
Marco Ferrari ◽  
Habiba Begum ◽  
Abid Ali ◽  
Joshua E.-Y. Lee ◽  
...  
Keyword(s):  
Electronic Circuit ◽  
Spiral Coil ◽  
Sensor Unit ◽  
First Order ◽  
High Impedance ◽  
Mems Resonator ◽  
Load Sensor ◽  
Micro Electromechanical System ◽  
Contour Mode ◽  
Periodic Switching

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode at about 6.3 MHz. The MEMS resonator is operated in one-port configuration and it is connected to a spiral coil, forming the sensor unit. A proximate electronic interrogation unit is electromagnetically coupled through a readout coil to the sensor unit. The proposed technique exploits interleaved excitation and detection phases of the MEMS resonator. A tailored electronic circuit manages the periodic switching between the excitation phase, where it generates the excitation signal driving the readout coil, and the detection phase, where it senses the transient decaying response of the resonator by measuring through a high-impedance amplifier the voltage induced back across the readout coil. This approach advantageously ensures that the readout frequency of the MEMS resonator is first order independent of the interrogation distance between the readout and sensor coils. The reported experimental results show successful contactless readout of the MEMS resonator independently from the interrogation distance over a range of 12 mm, and the application as a resonant sensor for ambient temperature and as a resonant acoustic-load sensor to detect and track the deposition and evaporation processes of water microdroplets on the MEMS resonator surface.

A fractal micro-electromechanical system and its pull-in stability

2021 ◽  
pp. 146134842098404
Author(s):  
Dan Tian ◽  
Chun-Hui He
Keyword(s):  
Fractal Model ◽  
Electromechanical System ◽  
Normal Operation ◽  
Fractal Derivative ◽  
Operation Period ◽  
Micro Electromechanical System

Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.

Fabrication of a Micro-Electromechanical System-Based Acetone Gas Sensor Using CeO2 Nanodot-Decorated WO3 Nanowires

2020 ◽  
Vol 12 (12) ◽  
pp. 14095-14104 ◽  
Author(s):  
Kaiping Yuan ◽  
Cheng-Yu Wang ◽  
Li-Yuan Zhu ◽  
Qi Cao ◽  
Jia-He Yang ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Electromechanical System ◽  
Micro Electromechanical System

A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise

2019 ◽  
Vol 29 (11) ◽  
pp. 115007
Author(s):  
Jinlong Song ◽  
Renxin Wang ◽  
Guojun Zhang ◽  
Zhenzhen Shang ◽  
Lansheng Zhang ◽  
...  
Keyword(s):  
Electromechanical System ◽  
Vector Hydrophone ◽  
Micro Electromechanical System ◽  
Vibration Noise

Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor

2009 ◽  
Vol 1 (1) ◽  
Author(s):  
Sree Vidhya ◽  
Gideon Praveen Kumar ◽  
Lazar Mathew
Keyword(s):  
System Design ◽  
Dna Hybridization ◽  
Electromechanical System ◽  
Antigen Binding ◽  
Cardiac Marker ◽  
Important Principle ◽  
Micro Electromechanical System ◽  
Geometric Variation ◽  
Proportional Decrease ◽  
Simulation Package

Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation in the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a “T-shaped” cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using INTELLISUITE software (a micro-electromechanical system design and simulation package). The simulations reveal that the T-shaped microcantilever is almost as sensitive as a thin cantilever and has relatively very low buckling effect. Simulations also reveal that with an increase in thickness of the cantilever, there is a proportional decrease in the sensitivity.

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