One port contour-mode ZnO piezoelectric MEMS resonator

2011 ◽  
Vol 88 (9) ◽  
pp. 3003-3010 ◽  
Author(s):  
Tadeusz Gryba ◽  
Julien Carlier ◽  
Shengxiang Wang ◽  
XingZhong Zhao ◽  
Shishang Guo ◽  
...  
Keyword(s):  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Contour Mode

Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing

2014 ◽  
Vol 220 ◽  
pp. 305-315 ◽  
Author(s):  
Tomás Manzaneque ◽  
Víctor Ruiz-Díez ◽  
Jorge Hernando-García ◽  
Elisabeth Wistrela ◽  
Martin Kucera ◽  
...  
Keyword(s):  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Viscosity Sensing

scholarly journals System Optimization Methodology for Integrated Piezoelectric MEMS Resonator Biochemical Sensors

2012 ◽  
Vol 47 ◽  
pp. 635-638 ◽  
Author(s):  
L. Sieben-Xu ◽  
J. Pettine ◽  
V. Petrescu ◽  
M. Vandecasteele ◽  
D.M. Karabacak
Keyword(s):  
System Optimization ◽  
Biochemical Sensors ◽  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Optimization Methodology

Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

2019 ◽  
Vol 297 ◽  
pp. 111541 ◽  
Author(s):  
Fei-Hong Bao ◽  
Jing-Fu Bao ◽  
Joshua En-Yuan Lee ◽  
Lei-Lei Bao ◽  
Muhammad Ammar Khan ◽  
...  
Keyword(s):  
Quality Factor ◽  
Phononic Crystals ◽  
Frame Structure ◽  
Mems Resonator ◽  
Piezoelectric Mems

A flexible, gigahertz, and free-standing thin film piezoelectric MEMS resonator with high figure of merit

2017 ◽  
Vol 111 (2) ◽  
pp. 023505 ◽  
Author(s):  
Yuan Jiang ◽  
Menglun Zhang ◽  
Xuexin Duan ◽  
Hao Zhang ◽  
Wei Pang
Keyword(s):  
Thin Film ◽  
Figure Of Merit ◽  
Free Standing ◽  
Mems Resonator ◽  
High Figure ◽  
Piezoelectric Mems

Density-viscosity sensor based on piezoelectric MEMS resonator and oscillator circuit

2014 ◽  
Author(s):  
Tomas Manzaneque ◽  
Victor Ruiz-Diez ◽  
Jorge Hernando-Garcia ◽  
Elisabeth Wistrela ◽  
Martin Kucera ◽  
...  
Keyword(s):  
Oscillator Circuit ◽  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Viscosity Sensor

scholarly journals Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Sensors ◽  
2020 ◽  
Vol 20 (12) ◽  
pp. 3483
Author(s):  
Marco Baù ◽  
Marco Ferrari ◽  
Habiba Begum ◽  
Abid Ali ◽  
Joshua E.-Y. Lee ◽  
...  
Keyword(s):  
Electronic Circuit ◽  
Spiral Coil ◽  
Sensor Unit ◽  
First Order ◽  
High Impedance ◽  
Mems Resonator ◽  
Load Sensor ◽  
Micro Electromechanical System ◽  
Contour Mode ◽  
Periodic Switching

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode at about 6.3 MHz. The MEMS resonator is operated in one-port configuration and it is connected to a spiral coil, forming the sensor unit. A proximate electronic interrogation unit is electromagnetically coupled through a readout coil to the sensor unit. The proposed technique exploits interleaved excitation and detection phases of the MEMS resonator. A tailored electronic circuit manages the periodic switching between the excitation phase, where it generates the excitation signal driving the readout coil, and the detection phase, where it senses the transient decaying response of the resonator by measuring through a high-impedance amplifier the voltage induced back across the readout coil. This approach advantageously ensures that the readout frequency of the MEMS resonator is first order independent of the interrogation distance between the readout and sensor coils. The reported experimental results show successful contactless readout of the MEMS resonator independently from the interrogation distance over a range of 12 mm, and the application as a resonant sensor for ambient temperature and as a resonant acoustic-load sensor to detect and track the deposition and evaporation processes of water microdroplets on the MEMS resonator surface.

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