Design and simulation of contour mode MEMS resonator on Si for power converters

2013 ◽  
Author(s):  
Abusaleh M. Imtiaz ◽  
Faisal H. Khan
Keyword(s):  
Power Converters ◽  
Mems Resonator ◽  
Contour Mode

scholarly journals Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Sensors ◽  
2020 ◽  
Vol 20 (12) ◽  
pp. 3483
Author(s):  
Marco Baù ◽  
Marco Ferrari ◽  
Habiba Begum ◽  
Abid Ali ◽  
Joshua E.-Y. Lee ◽  
...  
Keyword(s):  
Electronic Circuit ◽  
Spiral Coil ◽  
Sensor Unit ◽  
First Order ◽  
High Impedance ◽  
Mems Resonator ◽  
Load Sensor ◽  
Micro Electromechanical System ◽  
Contour Mode ◽  
Periodic Switching

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode at about 6.3 MHz. The MEMS resonator is operated in one-port configuration and it is connected to a spiral coil, forming the sensor unit. A proximate electronic interrogation unit is electromagnetically coupled through a readout coil to the sensor unit. The proposed technique exploits interleaved excitation and detection phases of the MEMS resonator. A tailored electronic circuit manages the periodic switching between the excitation phase, where it generates the excitation signal driving the readout coil, and the detection phase, where it senses the transient decaying response of the resonator by measuring through a high-impedance amplifier the voltage induced back across the readout coil. This approach advantageously ensures that the readout frequency of the MEMS resonator is first order independent of the interrogation distance between the readout and sensor coils. The reported experimental results show successful contactless readout of the MEMS resonator independently from the interrogation distance over a range of 12 mm, and the application as a resonant sensor for ambient temperature and as a resonant acoustic-load sensor to detect and track the deposition and evaporation processes of water microdroplets on the MEMS resonator surface.

One port contour-mode ZnO piezoelectric MEMS resonator

2011 ◽  
Vol 88 (9) ◽  
pp. 3003-3010 ◽  
Author(s):  
Tadeusz Gryba ◽  
Julien Carlier ◽  
Shengxiang Wang ◽  
XingZhong Zhao ◽  
Shishang Guo ◽  
...  
Keyword(s):  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Contour Mode

Read and Write Operations of Memory Device Consisting of Nonlinear MEMS Resonator

2014 ◽  
Vol 1 ◽  
pp. 352-355 ◽  
Author(s):  
Atsushi YAO ◽  
Takashi HIKIHARA
Keyword(s):  
Memory Device ◽  
Mems Resonator

Method for Evaluating Insertion Loss of EMI Filter Connected to Semiconductor Power Converters

2012 ◽  
Vol 132 (7) ◽  
pp. 727-735 ◽  
Author(s):  
Michio Tamate ◽  
Tamiko Sasaki ◽  
Akio Toba ◽  
Yasushi Matsumoto ◽  
Keiji Wada ◽  
...  
Keyword(s):  
Insertion Loss ◽  
Power Converters ◽  
Emi Filter

Integrated Current Sensing Technique Suitable for Step-Down Switch-Mode Power Converters

2009 ◽  
Vol E92-C (10) ◽  
pp. 1299-1303
Author(s):  
Xiaojuan XIA ◽  
Liang XIE ◽  
Weifeng SUN ◽  
Longxing SHI
Keyword(s):  
Power Converters ◽  
Current Sensing ◽  
Switch Mode ◽  
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