scholarly journals Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 577 ◽  
Author(s):  
Muhammad Saqib ◽  
Muhammad Mubasher Saleem ◽  
Naveed Mazhar ◽  
Saif Awan ◽  
Umar Shahbaz Khan
Keyword(s):  
Resonant Frequency ◽  
Analytical Model ◽  
Actuation Voltage ◽  
High Gain ◽  
Sense Mode ◽  
Drive Mode ◽  
Mass System ◽  
Mems Gyroscope ◽  
Flat Region ◽  
Thermally Actuated

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system consists of a single mass whose motion is decoupled from the drive mode using a decoupling frame. The gyroscope is designed to be operated in the flat region between the first two resonant peaks in drive mode, thus minimizing the effect of environmental and fabrication process variations on device performance. The high gain in the flat operational region is achieved by tuning the suspension beams stiffness. A detailed analytical model, considering the dynamics of both the electro-thermal actuator and multi-mass system, is developed. A parametric optimization is carried out, considering the microfabrication process constraints of the Metal Multi-User MEMS Processes (MetalMUMPs), to achieve high gain. The stiffness of suspension beams is optimized such that the sense mode resonant frequency lies in the flat region between the first two resonant peaks in the drive mode. The results acquired through the developed analytical model are verified with the help of 3D finite element method (FEM)-based simulations. The first three resonant frequencies in the drive mode are designed to be 2.51 kHz, 3.68 kHz, and 5.77 kHz, respectively. The sense mode resonant frequency is designed to be 3.13 kHz. At an actuation voltage of 0.2 V, the dynamically amplified drive mode gain in the sense mass is obtained to be 18.6 µm. With this gain, a capacitive change of 28.11   f F and 862.13   f F is achieved corresponding to the sense mode amplitude of 0.15   μ m and 4.5   μ m at atmospheric air pressure and in a vacuum, respectively.

scholarly journals Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Micromachines ◽  
2020 ◽  
Vol 11 (9) ◽  
pp. 862 ◽  
Author(s):  
Syed Ali Raza Bukhari ◽  
Muhammad Mubasher Saleem ◽  
Umar Shahbaz Khan ◽  
Amir Hamza ◽  
Javaid Iqbal ◽  
...  
Keyword(s):  
Dynamic Response ◽  
Microelectromechanical Systems ◽  
System Modeling ◽  
Silicon On Insulator ◽  
System Level ◽  
Voltage Sensitivity ◽  
Thermally Stable ◽  
Sense Mode ◽  
Drive Mode ◽  
Mems Gyroscope

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS processes (SOIMUMPs), with silicon as a structural material. The proposed design consists of a 3-DoF drive mode oscillator with the concept of addition of a collider mass which transmits energy from the drive mass to the passive sense mass. In the sense direction, 2-DoF sense mode oscillator is used to achieve dynamically-amplified displacement in the sense mass. A detailed analytical model for the dynamic response of MEMS gyroscope is presented and performance characteristics are validated through finite element method (FEM)-based simulations. The effect of operating air pressure and temperature variations on the air damping and resulting dynamic response is analyzed. The thermal stability of the design and corresponding effect on the mechanical and capacitive sensitivity, for an operating temperature range of −40 °C to 100 °C, is presented. The results showed that the proposed design is thermally stable, robust to environmental variations, and process tolerances with a wide operational bandwidth and high sensitivity. Moreover, a system-level model of the proposed gyroscope and its integration with the sensor electronics is presented to estimate the voltage sensitivity under the constraints of the readout electronic circuit.

scholarly journals Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

2014 ◽  
Vol 11 (99) ◽  
pp. 20140573 ◽  
Author(s):  
H. Droogendijk ◽  
R. A. Brookhuis ◽  
M. J. de Boer ◽  
R. G. P. Sanders ◽  
G. J. M. Krijnen
Keyword(s):  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Fast Response ◽  
Gyroscopic System ◽  
Drive Mode ◽  
Mems Gyroscope ◽  
Coriolis Forces ◽  
Mems Technology ◽  
Large Measurement ◽  
Theoretical Performance

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed.

scholarly journals Research on Novel Denoising Method of Variational Mode Decomposition in MEMS Gyroscope

2021 ◽  
Vol 21 (1) ◽  
pp. 19-24
Author(s):  
Xiaolei Wang ◽  
Huiliang Cao ◽  
Yuzhao Jiao ◽  
Taishan Lou ◽  
Guoqiang Ding ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Reduction Method ◽  
Noise Signal ◽  
Sampling Frequency ◽  
Variational Mode Decomposition ◽  
Denoising Method ◽  
Mems Gyroscope ◽  
Frequency Level ◽  
Mode Decomposition ◽  
Four Levels

Abstract The noise signal in the gyroscope is divided into four levels: sampling frequency level, device bandwidth frequency level, resonant frequency level, and carrier frequency level. In this paper, the signal in the dual-mass MEMS gyroscope is analyzed. Based on the variational mode decomposition (VMD) algorithm, a novel dual-mass MEMS gyroscope noise reduction method is proposed. The VMD method with different four-level center frequencies is used to process the original output signal of the MEMS gyroscope, and the results are analyzed by the Allan analysis of variance, which shows that the ARW of the gyroscope is increased from 1.998*10−1°/√h to 1.552*10−4°/√h, BS increased from 2.5261°/h to 0.0093°/h.

Micromachined Snap-In Resonators

2012 ◽  
Vol 2012 (DPC) ◽  
pp. 001920-001935 ◽  
Author(s):  
Colin Stevens ◽  
Robert Dean ◽  
Chris Wilson
Keyword(s):  
Resonant Frequency ◽  
Proof Mass ◽  
Pressure Sensors ◽  
Mass System ◽  
Dc Voltage ◽  
Movable Electrode ◽  
Mems Resonators ◽  
Spring Force ◽  
In Series ◽  
Fixed Electrode

MEMS resonators have many applications, including micromachined gyroscopes, resonating pressure sensors and RF devices. Typically, MEMS resonators consist of a proof mass and suspension system that allows the proof mass motion in one or two directions. Micromachined actuators provide kinetic energy to the proof mass, usually at its resonant frequency. In the simplest resonators, the actuators are driven with an AC signal at or near the resonant frequency. In more complex resonators, the actuator-proof mass system is placed in an amplifier feedback circuit so that the electromechanical system self-resonates. MEMS parallel plate actuators (PPAs) are simple to realize, yet complex nonlinear variable capacitors. If a DC voltage is applied in attempt to move the proof mass greater than 1/3 of the electrode rest gap distance, the device becomes unstable and the electrodes snap into contact. A current limiting resistor is often placed in series with the PPA to limit short circuit current due to a snap-in event. Consider the effect of placing a large resistor, on the order on 10 meg-Ohms, in series with the PPA. Then apply a DC voltage across the resistor-PPA pair of sufficient voltage to cause snap-in. Once the electrostatic force (ES) exceeds the spring force (SF), the electrodes will accelerate toward each other. The capacitance between the electrodes swells as the separation distance shrinks. Since the large resistor limits the charging rate of the capacitor, the voltage across it drops. Once the SF exceeds the EF, the momentum of the movable electrode brings it into contact with the fixed electrode, discharging the capacitor. The movable electrode then accelerates away from the fixed electrode while the resistor slowly allows recharging. After recharging, the cycle repeats resulting in stable oscillation. This resonator requires only a DC power supply, a resistor and a MEMS PPA.

Bandwidth Enhancement of Metamaterial Loaded Microstrip Antenna using Double Layered Substrate

2017 ◽  
Vol 5 (3) ◽  
pp. 661 ◽  
Author(s):  
V. Srinivasa Rao ◽  
K.V.V.S. Reddy ◽  
A.M. Prasad
Keyword(s):  
Resonant Frequency ◽  
Rapid Growth ◽  
Patch Antenna ◽  
Microstrip Antenna ◽  
Return Loss ◽  
Daily Life ◽  
High Gain ◽  
Metamaterial Structure ◽  
Bandwidth Enhancement ◽  
Layered Substrate

<p class="Abstract">Communication has become a key aspect of our daily life, becoming increasingly portable and mobile. This would need the use of micro strip antennas. The rapid growth has led to the need of antennas with smaller size, increased bandwidth and high gain. In this paper, a new version of micro strip patch antenna is designed by adopting double layered substrate concept and adding a layer of metamaterial structure to a square micro strip antenna. The antenna properties gain, return loss and bandwidth are studied to achieve better performance. The designed patch antenna has an improved bandwidth of 60% at a resonant frequency of 2.47 GHz. This antenna is designed and simulated by using HFSS software.</p>

scholarly journals A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

Micromachines ◽  
2019 ◽  
Vol 10 (4) ◽  
pp. 244
Author(s):  
Yang ◽  
Si ◽  
Han ◽  
Zhang ◽  
Ning ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Microelectromechanical Systems ◽  
Sense Mode ◽  
Drive Mode ◽  
Aln Film ◽  
Shape Structure ◽  
Mems Gyroscopes ◽  
Sense Electrode ◽  
Working Principle ◽  
Novel Design

This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on the surface of the vertical bar for driving the oscillating mass. A serpentine sense electrode is placed on the lateral bar. When the gyroscope is oscillating in drive mode, charges with equal quantity and opposite sign will be polarized and distributed symmetrically along the lateral bar. These charges neutralize each other at the sense electrode. Therefore, no coupling signals can be detected from the sense electrode. This design can realize the decoupling between the drive mode and sense mode. In this work, the T-shape decoupled structure was designed as the key component of an AlN piezoelectric gyroscope and the whole structure was simulated by COMSOL Multiphysics 5.2a. The working principle of the decoupling is described in detail. Electrical properties were characterized by the dynamic signal analyzer. According to the test results, the drive mode and the sense mode are decoupled. The coefficient of orthogonal coupling is 1.55%.

Anchored multi-DOF MEMS gyroscope having robust drive mode

2016 ◽  
Author(s):  
Payal Verma ◽  
S. N. Khonina ◽  
V. S. Pavelyev ◽  
S. A. Fomchenkov ◽  
B. V. Uma
Keyword(s):  
Drive Mode ◽  
Mems Gyroscope

scholarly journals Two Novel Measurements for the Drive-Mode Resonant Frequency of a Micromachined Vibratory Gyroscope

Sensors ◽  
2013 ◽  
Vol 13 (11) ◽  
pp. 15770-15784 ◽  
Author(s):  
Ancheng Wang ◽  
Xiaoping Hu ◽  
Bing Luo ◽  
Mingming Jiang ◽  
Xiaofeng He ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Drive Mode ◽  
Vibratory Gyroscope

Design Optimization for Non-Resonant MEMS Gyroscope

2009 ◽  
Author(s):  
Wei Cui ◽  
Xiaolin Chen ◽  
Wei Xue
Keyword(s):  
Device Performance ◽  
Sense Mode ◽  
Drive Mode ◽  
Resonant Frequencies ◽  
Frequency Matching ◽  
Wide Range ◽  
Mems Gyroscopes ◽  
Capacitive Mems ◽  
Effective Design ◽  
Model Approach

Conventional capacitive MEMS gyroscopes require close matching between the resonant frequencies of drive mode and sense mode. However, the uncertainties in the microfabrication process impair the robustness of the gyroscopes and often lead to unpredictable device performance. This paper analyzes a 4 degree-of-freedom (DOF) non-resonant gyroscope which is less vulnerable to the fabrication perturbations. Unlike the conventional resonant gyroscope which has only one resonant frequency for drive and sense modes, the 4-DOF gyroscope includes two resonant frequencies for each mode. The non-resonant gyroscope design aims to reduce resonance frequency matching, namely to minimize the effect of the inevitable fabrication uncertainties as well as to increase the bandwidth with less sacrifice to the sensitivity. The device performance is analyzed and optimized by the behavior model approach in CoventorWare which significantly accelerates the simulation compared to the traditional finite element method. The optimized non-resonant gyroscope with higher fabrication tolerance as well as enhanced device performance is proven to be an effective design and can be used in a wide range of applications.

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