A Theoretical Study on an Elastic Polymer Thin Film-Based Capacitive Wind-Pressure Sensor

This study is devoted to the design of an elastic polymer thin film-based capacitive wind-pressure sensor to meet the anticipated use for real-time monitoring of structural wind pressure in civil engineering. This sensor is composed of four basic units: lateral elastic deflection unit of a wind-driven circular polymer thin film, parallel plate capacitor with a movable circular electrode plate, spring-driven return unit of the movable electrode plate, and dielectric materials between electrode plates. The capacitance of the capacitor varies with the parallel move of the movable electrode plate which is first driven by the lateral elastic deflection of the wind-driven film and then is, after the wind pressure is reduced or eliminated, returned quickly by the drive springs. The closed-form solution for the contact problem between the wind-driven thin film and the spring-driven movable electrode plate is presented, and its reliability is proved by the experiment conducted. The numerical examples conducted show that it is workable that by using the numerical calibration based on the presented closed-form solution the proposed sensor is designed into a nonlinear sensor with larger pressure-monitoring range and faster response speed than the linear sensor usually based on experimental calibration.

Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy

An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards to the cover plate to close the aperture or retracted downwards into the through-hole to open it. Tri-state positioning of the shutter—i.e., open, rest, and close—is controlled by the hysteresis loop of the electrostatic pull-in and release behavior using the combination of the voltages applied to the shutter, the cover, and the substrate. Random access addressing of the shutters is demonstrated by a control system composed of MATLAB-coded Arduino electronics. The shutter array developed in this work is for a sub-cluster of a reconfigurable shutter array under development for a multi-object galactic astronomy.

DESIGN, SIMULATION AND BIFURCATION ANALYSIS OF A NOVEL MICROMACHINED TUNABLE CAPACITOR WITH EXTENDED TUNABILITY

In this paper, a novel RF MEMS variable capacitor has been presented. The applied techniques for increasing the tunability of the capacitor are the increasing of the maximum capacitance and decreasing of the minimum capacitance. The proposed structure is a simple cantilever Euler–Bernoulli micro-beam suspended between two conductive plates, in which the lower plate is considered as stationary reference electrode. In this structure, two pedestals are located in both tips of the cantilever beam. In the capacitive micro-structures, increasing the applied voltage decreases the equivalent stiffness of the structure and leads the system to an unstable condition (pull-in phenomenon). By deflecting the beam toward the upper (lower) plate the minimum (maximum) capacitance decreases (increases) and tunability increases consequently. The located pedestals increase and decrease the maximum and minimum capacitance respectively. The results show that the proposed structure increases the tunability of cantilever beam significantly. Furthermore, bifurcation behavior of movable electrode has been investigated.