Anchored multi-DOF MEMS gyroscope having robust drive mode

2016 ◽  
Author(s):  
Payal Verma ◽  
S. N. Khonina ◽  
V. S. Pavelyev ◽  
S. A. Fomchenkov ◽  
B. V. Uma
Keyword(s):  
Drive Mode ◽  
Mems Gyroscope

scholarly journals Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

2014 ◽  
Vol 11 (99) ◽  
pp. 20140573 ◽  
Author(s):  
H. Droogendijk ◽  
R. A. Brookhuis ◽  
M. J. de Boer ◽  
R. G. P. Sanders ◽  
G. J. M. Krijnen
Keyword(s):  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Fast Response ◽  
Gyroscopic System ◽  
Drive Mode ◽  
Mems Gyroscope ◽  
Coriolis Forces ◽  
Mems Technology ◽  
Large Measurement ◽  
Theoretical Performance

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed.

scholarly journals Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 577 ◽  
Author(s):  
Muhammad Saqib ◽  
Muhammad Mubasher Saleem ◽  
Naveed Mazhar ◽  
Saif Awan ◽  
Umar Shahbaz Khan
Keyword(s):  
Resonant Frequency ◽  
Analytical Model ◽  
Actuation Voltage ◽  
High Gain ◽  
Sense Mode ◽  
Drive Mode ◽  
Mass System ◽  
Mems Gyroscope ◽  
Flat Region ◽  
Thermally Actuated

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system consists of a single mass whose motion is decoupled from the drive mode using a decoupling frame. The gyroscope is designed to be operated in the flat region between the first two resonant peaks in drive mode, thus minimizing the effect of environmental and fabrication process variations on device performance. The high gain in the flat operational region is achieved by tuning the suspension beams stiffness. A detailed analytical model, considering the dynamics of both the electro-thermal actuator and multi-mass system, is developed. A parametric optimization is carried out, considering the microfabrication process constraints of the Metal Multi-User MEMS Processes (MetalMUMPs), to achieve high gain. The stiffness of suspension beams is optimized such that the sense mode resonant frequency lies in the flat region between the first two resonant peaks in the drive mode. The results acquired through the developed analytical model are verified with the help of 3D finite element method (FEM)-based simulations. The first three resonant frequencies in the drive mode are designed to be 2.51 kHz, 3.68 kHz, and 5.77 kHz, respectively. The sense mode resonant frequency is designed to be 3.13 kHz. At an actuation voltage of 0.2 V, the dynamically amplified drive mode gain in the sense mass is obtained to be 18.6 µm. With this gain, a capacitive change of 28.11   f F and 862.13   f F is achieved corresponding to the sense mode amplitude of 0.15   μ m and 4.5   μ m at atmospheric air pressure and in a vacuum, respectively.

A Theoretical and Experimental Study on Temperature Dependent Characteristics of Silicon MEMS Gyroscope Drive Mode

2011 ◽  
Vol 403-408 ◽  
pp. 4237-4243 ◽  
Author(s):  
Rui Feng ◽  
An Ping Qiu ◽  
Qin Shi ◽  
Yan Su
Keyword(s):  
Temperature Coefficient ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Critical Factor ◽  
Temperature Dependent ◽  
Drive Mode ◽  
Modal Frequency ◽  
Mems Gyroscope ◽  
Key Factor ◽  
Theoretical Results

The prototype of the silicon micro gyroscope is introduced. Temperature is the key factor that affects the performance of the gyroscope. In this paper, temperature dependent characteristics of silicon micro gyroscope drive mode is analyzed. The theoretical results show that temperature coefficient of the Young’s modulus is the most critical factor that affects temperature characteristics of the silicon micro gyroscope’s drive modal frequency and the frequency is proportional to the temperature. The results are verified by finite element simulations. The silicon micro gyroscopes are experimented in a high accurate thermostat. The drive modal frequency and temperature are measured and sampled. These experimental results show that the temperature coefficient of Young’s modulus is the key factor and the frequency is proportional to the temperature. The theoretic analyses are also validated by the experiments.

Control of Vibratory MEMS Gyroscope with the Drive Mode Excited Through Parametric Resonance

2021 ◽  
pp. 1-34
Author(s):  
Tamir Perl ◽  
Ronen Maimon ◽  
Slava Krylov ◽  
Nahum Shimkin
Keyword(s):  
Parametric Resonance ◽  
Degrees Of Freedom ◽  
Multiple Scales ◽  
Automatic Gain Control ◽  
Gain Control ◽  
Drive Mode ◽  
Mems Gyroscope ◽  
Control Loops ◽  
Mode Control ◽  
Parameters Perturbation

Abstract In this paper we present a control strategy for a MEMS gyroscope with a drive mode excited through parametric resonance. The reduced order two degrees of freedom model of the device is built and the drive mode control is implemented using Phase Locked Loop (PLL) and Automatic Gain Control (AGC) loops. A sense mode vibration control algorithm is developed as well for enhanced sensor performance. The analysis of the drive mode control loops is conducted using the multiple scales method. The robustness of the suggested control loops to parameters perturbation is demonstrated using the model. A simplified linear model of the control loops is shown to predict the device behavior with good accuracy.

scholarly journals Design And Analysis of Rotation Rate Sensor - Modeling of vibratory MEMs Gyroscope

2013 ◽  
pp. 191-198
Author(s):  
Priya.P. Shreshtha ◽  
Sushas S. Mohite
Keyword(s):  
Rotation Rate ◽  
Design Concept ◽  
Detailed Account ◽  
Drive Mode ◽  
Wide Bandwidth ◽  
Mems Gyroscope ◽  
Vibratory Gyroscope ◽  
Frequency Responses ◽  
Rate Sensor ◽  
Sensor Modeling

The present work provides a detailed account of design and analysis for a typical comb-driven capacitively sensed microgyroscope. The general approach pursured in this paper is to show the possibility of achieving wide-bandwidth frequency responses in drive mode of vibratory gyroscope. Towards this goal one major design concept were discussed.

scholarly journals Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1030
Author(s):  
Hussamud Din ◽  
Faisal Iqbal ◽  
Byeungleul Lee
Keyword(s):  
Microelectromechanical Systems ◽  
Angular Rate ◽  
Mode Analysis ◽  
Comsol Multiphysics ◽  
Mechanical Sensitivity ◽  
Drive Mode ◽  
Element Analysis ◽  
Mems Gyroscope ◽  
Fea Model ◽  
Mode Split

In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simplified single-drive, 3-axis MEMS gyroscope was analyzed using a mode split approach, having a drive resonant frequency of 24,918 Hz, with the x-sense, y-sense, and z-sense being 25,625, 25,886, and 25,806 Hz, respectively. Drive-mode analysis was carried out and a maximum drive-displacement of 4.0 μm was computed for a 0.378 μN harmonic drive force. Mechanical sensitivity was computed at 2000 degrees per second (dps) input angular rate while the scale factor for roll, pitch, and yaw was computed to be 0.014, 0.011, and 0.013 nm/dps, respectively.

An ADRC Method for Vibrating MEMS Gyrosocope Drive

2011 ◽  
Vol 211-212 ◽  
pp. 264-269 ◽  
Author(s):  
Shao Hua Niu ◽  
Shi Qiao Gao ◽  
Hai Peng Liu ◽  
Lei Jin
Keyword(s):  
Time Dependent ◽  
Good Effect ◽  
Drive Mode ◽  
Mems Gyroscope ◽  
The Stability ◽  
Stability And Accuracy

The stability and accuracy of the drive mode are important for the performance of vibrating MEMS gyroscope. At present, the PI-like controller is always used in the control of the drive mode of vibrating MEMS gyroscope. The PI-like control has good effect on rejecting the literal disturbance, but it can’t reject the time-dependent disturbance well. The disturbance for the MEMS gyroscope is so uncertain that the stability and accuracy of the PI-like control for the gyro are comparatively low. In this paper, an ADRC method for vibrating MEMS gyroscope drive is introduced, and it is proved that this method can rapidly and stably control the MEMS gyro drive mode by simulation and comparing with the PI-like method.

scholarly journals MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

Micromachines ◽  
2019 ◽  
Vol 10 (4) ◽  
pp. 248 ◽  
Author(s):  
Min Cui ◽  
Yong Huang ◽  
Wei Wang ◽  
Huiliang Cao
Keyword(s):  
Temperature Compensation ◽  
Scale Factor ◽  
Compensation Method ◽  
Vibration Characteristic ◽  
Drive Mode ◽  
Variable Resistor ◽  
Mems Gyroscope ◽  
Bias Drift ◽  
Temperature Variable ◽  
Mode Vibration

In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper.

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