scholarly journals Two Novel Measurements for the Drive-Mode Resonant Frequency of a Micromachined Vibratory Gyroscope

Sensors ◽  
2013 ◽  
Vol 13 (11) ◽  
pp. 15770-15784 ◽  
Author(s):  
Ancheng Wang ◽  
Xiaoping Hu ◽  
Bing Luo ◽  
Mingming Jiang ◽  
Xiaofeng He ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Drive Mode ◽  
Vibratory Gyroscope

scholarly journals Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 577 ◽  
Author(s):  
Muhammad Saqib ◽  
Muhammad Mubasher Saleem ◽  
Naveed Mazhar ◽  
Saif Awan ◽  
Umar Shahbaz Khan
Keyword(s):  
Resonant Frequency ◽  
Analytical Model ◽  
Actuation Voltage ◽  
High Gain ◽  
Sense Mode ◽  
Drive Mode ◽  
Mass System ◽  
Mems Gyroscope ◽  
Flat Region ◽  
Thermally Actuated

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system consists of a single mass whose motion is decoupled from the drive mode using a decoupling frame. The gyroscope is designed to be operated in the flat region between the first two resonant peaks in drive mode, thus minimizing the effect of environmental and fabrication process variations on device performance. The high gain in the flat operational region is achieved by tuning the suspension beams stiffness. A detailed analytical model, considering the dynamics of both the electro-thermal actuator and multi-mass system, is developed. A parametric optimization is carried out, considering the microfabrication process constraints of the Metal Multi-User MEMS Processes (MetalMUMPs), to achieve high gain. The stiffness of suspension beams is optimized such that the sense mode resonant frequency lies in the flat region between the first two resonant peaks in the drive mode. The results acquired through the developed analytical model are verified with the help of 3D finite element method (FEM)-based simulations. The first three resonant frequencies in the drive mode are designed to be 2.51 kHz, 3.68 kHz, and 5.77 kHz, respectively. The sense mode resonant frequency is designed to be 3.13 kHz. At an actuation voltage of 0.2 V, the dynamically amplified drive mode gain in the sense mass is obtained to be 18.6 µm. With this gain, a capacitive change of 28.11   f F and 862.13   f F is achieved corresponding to the sense mode amplitude of 0.15   μ m and 4.5   μ m at atmospheric air pressure and in a vacuum, respectively.

scholarly journals Research of Coriolis vibratory gyroscope tracking system for resonant frequency

2015 ◽  
Vol 3 (2(23)) ◽  
pp. 4
Author(s):  
Олена Миколаївна Безвесільна ◽  
Віктор Григорович Цірук ◽  
Андрій Геннадійович Ткачук ◽  
Анастасія Олександрівна Просюк ◽  
Ніна Вікторівна Самсонова ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Tracking System ◽  
Vibratory Gyroscope

An analog circuit model for drive mode of MEMS vibratory gyroscope

2017 ◽  
Vol 24 (6) ◽  
pp. 2701-2709 ◽  
Author(s):  
Meghdad Mohammadi ◽  
Hooman Kaabi ◽  
Karim Ansari-Asl
Keyword(s):  
Analog Circuit ◽  
Circuit Model ◽  
Drive Mode ◽  
Vibratory Gyroscope

scholarly journals Design And Analysis of Rotation Rate Sensor - Modeling of vibratory MEMs Gyroscope

2013 ◽  
pp. 191-198
Author(s):  
Priya.P. Shreshtha ◽  
Sushas S. Mohite
Keyword(s):  
Rotation Rate ◽  
Design Concept ◽  
Detailed Account ◽  
Drive Mode ◽  
Wide Bandwidth ◽  
Mems Gyroscope ◽  
Vibratory Gyroscope ◽  
Frequency Responses ◽  
Rate Sensor ◽  
Sensor Modeling

The present work provides a detailed account of design and analysis for a typical comb-driven capacitively sensed microgyroscope. The general approach pursured in this paper is to show the possibility of achieving wide-bandwidth frequency responses in drive mode of vibratory gyroscope. Towards this goal one major design concept were discussed.

An Improved Phase Lock Loop for Micromechanical Gyroscope with a Carrier Modulation

2013 ◽  
Vol 562-565 ◽  
pp. 398-402 ◽  
Author(s):  
Shi Chang Hu ◽  
Hui Jie Zhu ◽  
Ming Jun Ma ◽  
Yi Dong Liu ◽  
Zhong He Jin
Keyword(s):  
Signal Processing ◽  
Digital Signal Processing ◽  
Resonant Frequency ◽  
Digital Signal ◽  
Phase Lock Loop ◽  
Drive Mode ◽  
Resonant Frequencies ◽  
Phase Lock ◽  
Micromechanical Gyroscope ◽  
Reference Phase

This paper presents an improved phase lock loop for a micromechanical vibrating gyroscope with a carrier modulation. The loop keeps the gyroscope working at the resonant frequency of its drive mode. Digital signal processing is adopted in design of the loop and Xilinx virtex4 series FPGA is used. Compare with the conventional way, it decreases the resources in FPGA including registers, LUTs, and DSP48s. The realization shows a reduction of 51.06% for registers, 52.68% for LUTs and 18.18% for DSP48s. Besides, the loop has good portability for different devices which have different resonant frequencies due to the fabrication error. No adjustment is needed unlike the conventional loop whose reference phase has to be adjusted manually.

Effect of Varied Probe Length on the Resonant Frequency of a Circular Cross-Sectional Cavity

2005 ◽  
Vol 2 (2) ◽  
pp. 79
Author(s):  
Mohd Khairul Mohd Salleh ◽  
Mohamad Syukri Suhaili ◽  
Zuhani Ismail ◽  
Zaiki Awang
Keyword(s):  
Resonant Frequency ◽  
Cavity Resonator ◽  
Simple Design ◽  
Cross Sectional ◽  
Probe Length ◽  
Mode Wave ◽  
The One

A simple design of a metallic circular cross-sectional air-filled cavity is presented. Two probes of varied lengths are used to excite TE112-mode wave into the cavity to give a resonant frequency of 5.86 GHz. The experiments show that the resonant frequency of the cavity resonator decreases as the lengths of the probes are increased. The shortest probe in the range of study gives the closest resonant frequency to the one desired.

Air Gap Tuning Effect on the Resonant Frequency and Half-power Bandwidth of Superconducting Microstrip Patch

PIERS Online ◽  
2009 ◽  
Vol 5 (4) ◽  
pp. 350-354 ◽  
Author(s):  
Tarek Fortaki ◽  
Siham Benkouda ◽  
Mounir Amir ◽  
Abdelmadjid Benghalia
Keyword(s):  
Resonant Frequency ◽  
Air Gap ◽  
Microstrip Patch ◽  
Half Power
Sign in / Sign up

Export Citation Format

Share Document