scholarly journals Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Micromachines ◽  
2019 ◽  
Vol 11 (1) ◽  
pp. 48 ◽  
Author(s):  
Harald Plank ◽  
Robert Winkler ◽  
Christian H. Schwalb ◽  
Johanna Hütner ◽  
Jason D. Fowlkes ◽  
...  
Keyword(s):  
Electron Beam ◽  
Scanning Probe Microscopy ◽  
Surface Characterization ◽  
Scale Up ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Nano Fabrication ◽  
Essential Surface ◽  
Ideal Tool

Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.

scholarly journals Advanced Nanomeasuring Techniques for Surface Characterization

ISRN Optics ◽  
2012 ◽  
Vol 2012 ◽  
pp. 1-23 ◽  
Author(s):  
Salah H. R. Ali
Keyword(s):  
Scanning Probe Microscopy ◽  
Surface Characterization ◽  
Technical Committee ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Measuring Techniques ◽  
Basic Approaches ◽  
Computing Measuring ◽  
Areal Surface

Advanced precise and accurate nanomeasurement techniques play an important role to improve the function and quality of surface characterization. There are two basic approaches, the hard measuring techniques and the soft computing measuring techniques. The advanced soft measuring techniques include coordinate measuring machines, roundness testing facilities, surface roughness, interferometric methods, confocal optical microscopy, scanning probe microscopy, and computed tomography at the level of nanometer scale. On the other hand, a new technical committee in ISO is established to address characterization issues posed by the areal surface texture and measurement methods. This paper reviews the major advanced soft metrology techniques obtained by optical, tactile, and other means using instruments, classification schemes of them, and their applications in the engineering surfaces. Furthermore, future trends under development in this area are presented and discussed to display proposed solutions for the important issues that need to be addressed scientifically.

scholarly journals Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

2015 ◽  
Vol 118 (22) ◽  
pp. 225304 ◽  
Author(s):  
Manuel Mannarino ◽  
Ravi Chintala ◽  
Alain Moussa ◽  
Clement Merckling ◽  
Pierre Eyben ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Surface Characterization ◽  
Scanning Probe ◽  
Probe Microscopy

Nanorods Produced on the Surface of Thin Films of TiOx by Surface-Imprinting

2003 ◽  
Vol 787 ◽  
Author(s):  
M. Joseph Roberts ◽  
Scott K. Johnson
Keyword(s):  
Thin Films ◽  
Recent Work ◽  
Scanning Probe Microscopy ◽  
Sol Gel ◽  
Scanning Probe ◽  
Surface Imprinting ◽  
Probe Microscopy ◽  
Sol Gel Films ◽  
Nanoscale Features

ABSTRACTWorldwide, there is great interest in new processes for production of nanoscale features in materials surfaces. Our recent work explores imprinting of nanosized objects into thin films. In this paper, we present results from surface imprinting of TiOx sol-gel films with anodized alumina. Scanning Probe Microscopy provides evidence for the quality of the imprinting process.

The Role of Scanning Probe Microscopy in Drug Delivery Research

1996 ◽  
Vol 13 (3-4) ◽  
pp. 225-256 ◽  
Author(s):  
Kevin M. Shakesheff ◽  
Martyn C. Davies ◽  
Clive J. Roberts ◽  
Saul J. B. Tendler ◽  
Philip M. Williams
Keyword(s):  
Drug Delivery ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Probe Microscopy

Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices Using Microwave Impedance Microscopy

2015 ◽  
Author(s):  
Benedict Drevniok ◽  
St. John Dixon-Warren ◽  
Oskar Amster ◽  
Stuart L Friedman ◽  
Yongliang Yang
Keyword(s):  
Scanning Probe Microscopy ◽  
Semiconductor Devices ◽  
Cmos Image Sensor ◽  
Image Sensor ◽  
Scanning Probe ◽  
Cross Sectional ◽  
Probe Microscopy ◽  
Dopant Profiling ◽  
Capacitance Voltage

Abstract Scanning microwave impedance microscopy was used to analyze a CMOS image sensor sample to reveal details of the dopant profiling in planar and cross-sectional samples. Sitespecific capacitance-voltage spectroscopy was performed on different regions of the samples.

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