scholarly journals Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

2015 ◽  
Vol 118 (22) ◽  
pp. 225304 ◽  
Author(s):  
Manuel Mannarino ◽  
Ravi Chintala ◽  
Alain Moussa ◽  
Clement Merckling ◽  
Pierre Eyben ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Surface Characterization ◽  
Scanning Probe ◽  
Probe Microscopy

scholarly journals Nanoscale Characterization of Silicon-On-Insulator Nanowires by Multimode Scanning Probe Microscopy

2013 ◽  
Vol 38 (2) ◽  
pp. 265-268
Author(s):  
Leonid Bolotov ◽  
Tetsuya Tada ◽  
Yukinori Morita ◽  
Vladimir Poborchii ◽  
Toshihiko Kanayama
Keyword(s):  
Scanning Probe Microscopy ◽  
Silicon On Insulator ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Nanoscale Characterization
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