Nitrogen deficiency and metal dopant induced sub-stoichiometry in titanium nitride thin films: a comparative study
2013 ◽
Vol 104
(9)
◽
pp. 879-884
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1989 ◽
Vol 50
(C7)
◽
pp. C7-169-C7-173
Keyword(s):
Keyword(s):
1987 ◽
Vol 5
(4)
◽
pp. 1903-1904
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2013 ◽
Vol 573
◽
pp. 112-117
◽
Keyword(s):
2001 ◽
Vol 62
(8)
◽
pp. 1387-1391
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